DOI

  • V. A. Gritsenko
  • A. A. Gismatulin
Original languageEnglish
Article number142901
Number of pages4
JournalApplied Physics Letters
Volume117
Issue number14
DOIs
Publication statusPublished - 5 Oct 2020

    OECD FOS+WOS

    Research areas

  • ATOMIC LAYER DEPOSITION, CONDUCTION, NITRIDE, FILMS

ID: 25687205