Research output: Contribution to journal › Article › peer-review
Charge transport mechanism in [GeOx](z)[SiO2](1-z) based MIS structures. / Yushkov, I. D.; Gismatulin, A. A.; Prosvirin, I. P. et al.
In: Applied Physics Letters, Vol. 125, No. 24, 242901, 09.12.2024.Research output: Contribution to journal › Article › peer-review
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TY - JOUR
T1 - Charge transport mechanism in [GeOx](z)[SiO2](1-z) based MIS structures
AU - Yushkov, I. D.
AU - Gismatulin, A. A.
AU - Prosvirin, I. P.
AU - Kamaev, G. N.
AU - Marin, D. V.
AU - Vergnat, M.
AU - Volodin, V. A.
N1 - The authors acknowledge the Shared Research Center \u201CVTAN\u201D of the Novosibirsk State University. This investigation was supported jointly by grants from the Russian Science Foundation (Project No. 22-19-00369 for the analysis of charge transport mechanism) and the state assignment from the Ministry of Science and Higher Education of the Russian Federation (Theme No. FSUS 2024-0020 for the structural studies). The authors are grateful to Professor V. A. Gritsenko and Dr. P. Geidt for useful discussions.
PY - 2024/12/9
Y1 - 2024/12/9
N2 - The mechanisms of conductivity in metal-insulator-semiconductor (MIS) structures based on [GeOx](z)[SiO2](1-z) films (0.25 ≤ z ≤ 1) fabricated by co-evaporation of germanium oxide and silicon oxide powders in vacuum and deposition on a p+-type silicon substrate are studied. Indium tin oxide deposited by magnetron method is used as the top electrode. According to IR spectroscopy, Ge-O, Si-O, and Ge-O-Si bonds are detected in the films, while no features related to the presence of germanium clusters are found in the Raman spectra. The current-voltage characteristics (I-V curves) are measured at different temperatures and analyzed by applying the eight most common models of charge transport in MIS structures. It is found that the experimental I-V curves are most accurately approximated in the space charge limited current model, and the parameters of the charge traps are determined within this model.
AB - The mechanisms of conductivity in metal-insulator-semiconductor (MIS) structures based on [GeOx](z)[SiO2](1-z) films (0.25 ≤ z ≤ 1) fabricated by co-evaporation of germanium oxide and silicon oxide powders in vacuum and deposition on a p+-type silicon substrate are studied. Indium tin oxide deposited by magnetron method is used as the top electrode. According to IR spectroscopy, Ge-O, Si-O, and Ge-O-Si bonds are detected in the films, while no features related to the presence of germanium clusters are found in the Raman spectra. The current-voltage characteristics (I-V curves) are measured at different temperatures and analyzed by applying the eight most common models of charge transport in MIS structures. It is found that the experimental I-V curves are most accurately approximated in the space charge limited current model, and the parameters of the charge traps are determined within this model.
UR - https://www.scopus.com/record/display.uri?eid=2-s2.0-85212412190&origin=inward&txGid=4064dacf77c4d39a3cf74419e815c632
UR - https://www.mendeley.com/catalogue/a15f630c-b2b4-3aa3-8b60-657980aa2184/
U2 - 10.1063/5.0240239
DO - 10.1063/5.0240239
M3 - Article
VL - 125
JO - Applied Physics Letters
JF - Applied Physics Letters
SN - 0003-6951
IS - 24
M1 - 242901
ER -
ID: 61318499