• O. M. Orlov
  • A. A. Gismatulin
  • V. A. Gritsenko
  • D. S. Mizginov
Original languageEnglish
Pages (from-to)372-377
Number of pages6
JournalRussian Microelectronics
Volume49
Issue number5
DOIs
Publication statusPublished - 1 Sept 2020

    OECD FOS+WOS

ID: 25687260