• O. V. Naumova
  • V. M. Generalov
  • E. G. Zaitseva
  • A. V. Latyshev
  • A. L. Aseev
  • S. A. Pyankov
  • I. V. Kolosova
  • G. G. Ananko
  • A. P. Agafonov
  • E. V. Gavrilova
  • R. A. Maksyutov
  • A. S. Safatov
Original languageEnglish
Pages (from-to)137-145
Number of pages9
JournalRussian Microelectronics
Volume50
Issue number3
DOIs
Publication statusPublished - May 2021

    OECD FOS+WOS

  • 2.02 ELECTRICAL ENG, ELECTRONIC ENG
  • 2.05 MATERIALS ENGINEERING
  • 1.03 PHYSICAL SCIENCES AND ASTRONOMY

    State classification of scientific and technological information

  • 34.25 Virology

ID: 34108730