Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review
Final published version
| Original language | Russian |
|---|---|
| Title of host publication | Формирование частиц Ge на поверхности ITO методами электронной и взрывной литографии |
| Pages | 162-163 |
| Number of pages | 2 |
| Publication status | Published - 2023 |
ID: 59394907