DOI

Translated title of the contributionOPTICAL PHONONS IN INSB NANOCRYSTALS ION-BEAM SYNTHESIZED AT THE BONDING SI/SIO2 INTERFACE OF SILICON-ON-INSULATOR STRUCTURES
Original languageRussian
Pages (from-to)96-102
Number of pages7
JournalАвтометрия
Volume61
Issue number3
DOIs
Publication statusPublished - 2025

    OECD FOS+WOS

  • 2.11 OTHER ENGINEERING AND TECHNOLOGIES

    Research areas

  • ION IMPLANTATION, NANOCRYSTALS, OPTICAL PHONONS

ID: 71989486