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Способ определения концентрации связей Ge-O в пленках оксида германия из анализа спектров ИК-пропускания
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Laboratory of functional diagnostics of low-dimensional structures for nanoelectronics
General Physics Section
Section of Physical Methods of Solid State Research
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Владимир Алексеевич Володин
(Author)
Павел Викторович Гейдт
(Author)
Original language
Russian
Patent number
73
Priority date
22.12.2022
Publication status
Published -
22 Dec 2022
State classification of scientific and technological information
29.19.04 Structure of solids
29.19.07 Vibrations of crystal lattices
ID: 42220512
