DOI

  • И.Е. ТЫСЧЕНКО
  • Ч. СЫ
  • С.Г. ЧЕРКОВА
  • В.П. ПОПОВ
Translated title of the contributionVISIBLE PHOTOLUMINESCENCE OF IN+- AND AS+-ION IMPLANTED SIO2 FILMS
Original languageRussian
Pages (from-to)59-65
Number of pages7
JournalАвтометрия
Volume60
Issue number1
DOIs
Publication statusPublished - 2024

    OECD FOS+WOS

  • 2.11 OTHER ENGINEERING AND TECHNOLOGIES

ID: 71985988