Search
Frontpage
Staff
Prizes
Equipment
Projects
Activities
Research units
Research output
Press/Media
About
Метод получения антиотражающих покрытий из массива частиц SiGe посредством их самоорганизации на подложках кремния
Research output
:
Patent
›
Know-how registration
Laboratory of functional diagnostics of low-dimensional structures for nanoelectronics
Analytical and Technological Research Center "High Technologies & Nanostructured Materials"
Overview
Cite this
Documents
НОУ-ХАУ № 50
1.19 MB
, PDF document
Александр Андреевич Шкляев
(Author)
Dmitry Utkin
(Author)
Original language
Russian
Patent number
50
Priority date
08.12.2021
Publication status
Published -
9 Dec 2021
State classification of scientific and technological information
29.19.31 Semiconductors
29.19.22 Physics of nanostructures. Diskeraser-wide structure. Mesoscopic structures
29.31.27 Interaction of optical radiation with matter
ID: 34914062
