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Способ определения коэффициента уточнения объема объектов на поверхности с использованием АСМ с учетом высоты объектов
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Laboratory of functional diagnostics of low-dimensional structures for nanoelectronics
Department of Natural Sciences
Section of Physical Methods of Solid State Research
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Алина Витальевна Лапега
(Author)
Павел Викторович Гейдт
(Author)
Original language
Russian
Patent number
78
Priority date
22.12.2022
Publication status
Published -
22 Dec 2022
State classification of scientific and technological information
29.19.13 Mechanical properties of solids
90.27.27 Measurement of geometrical quantities
ID: 42221790
