Research output: Contribution to journal › Article › peer-review
Final published version
| Original language | Russian |
|---|---|
| Article number | 6 |
| Pages (from-to) | 28-31 |
| Number of pages | 4 |
| Journal | Вакуумная техника и технология |
| Volume | 29 |
| Issue number | 3 |
| Publication status | Published - 2019 |
ID: 27446998