Translated title of the contributionImplementation of terahertz high-pass filters based on all-metal microsrtuctures using deep x-ray lithography
Original languageRussian
Article number2
Pages (from-to)14-27
Number of pages14
JournalАвтометрия
Volume55
Issue number2
DOIs
Publication statusPublished - 2019

    OECD FOS+WOS

    State classification of scientific and technological information

  • 29 PHYSICS

ID: 22427176