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Конструкторская документация на установку синтеза монокристаллов и нанокристаллов в контролируемой атмосфере
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Applied Physics Division
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Евгений Николаевич Галашов
(Author)
Original language
Russian
Patent number
85
Priority date
27.10.2023
Publication status
Published -
27 Oct 2023
State classification of scientific and technological information
47.13.07 Technology and equipment for manufacture of devices of nanoelectronics
ID: 59501574
