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СПОСОБ ИЗМЕРЕНИЯ ДЛЯ КОНТРОЛЯ ВОДОРОДА В ТВЕРДОТЕЛЬНОМ МАТЕРИАЛЕ
Research output
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Patent
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Patent for invention
Laboratory of functional diagnostics of low-dimensional structures for nanoelectronics
General Physics Section
Section of Automation of Physical and Technical Research
Analytical and Technological Research Center "High Technologies & Nanostructured Materials"
Department of Physics
Overview
Cite this
Links
https://www1.fips.ru/registers-doc-view/fips_servlet?DB=RUPAT&DocNumber=2531081&TypeFile=html
Владимир Алексеевич Володин
(Author)
Геннадий Николаевич Камаев
(Author)
Александр Харитонович Антоненко
(Author)
Дмитрий Игоревич Кошелев
(Author)
Original language
Russian
Patent number
2531081
IPC
G01N21/65,H01L21/66
Priority date
18.07.2013
Publication status
Published -
20 Oct 2014
ID: 26695165
