TY - JOUR

T1 - Volatile asymmetric fluorinated (O^N)-chelated palladium complexes

T2 - From ligand sources to MOCVD application

AU - Nikolaeva, N. S.

AU - Kuratieva, N. V.

AU - Vikulova, E. S.

AU - Stabnikov, P. A.

AU - Morozova, N. B.

N1 - Publisher Copyright: © 2019 Elsevier Ltd

PY - 2019/10/1

Y1 - 2019/10/1

N2 - The work deals with the volatile asymmetric palladium complexes of β-ketoiminate-type as a new direction to design the effective partially fluorinated (O^N)-chelated precursors for metal–organic chemical vapor deposition (MOCVD). To determine the effect of the substituent on the donor nitrogen atom, [Pd(CF3COCHCN(R)CH3)2]2 complexes with R = CH3 (Mei-tfac) and N(CH3)2 (dmht) were synthesized and characterized by elemental analysis, IR and NMR spectroscopy. The molecular and crystal structures of the complexes as well as the initial ligand sources HMei-tfac and Hdmht were determined by single-crystal XRD. The obtained a new crystallographic and thermal (TG/DTA) information combined with the crystal lattice energy calculations allowed to reveal the features of the N-substituted fluorinated complexes in comparison with their non-fluorinated analogs. The possibility of using the proposed compounds as MOCVD precursors was experimentally confirmed.

AB - The work deals with the volatile asymmetric palladium complexes of β-ketoiminate-type as a new direction to design the effective partially fluorinated (O^N)-chelated precursors for metal–organic chemical vapor deposition (MOCVD). To determine the effect of the substituent on the donor nitrogen atom, [Pd(CF3COCHCN(R)CH3)2]2 complexes with R = CH3 (Mei-tfac) and N(CH3)2 (dmht) were synthesized and characterized by elemental analysis, IR and NMR spectroscopy. The molecular and crystal structures of the complexes as well as the initial ligand sources HMei-tfac and Hdmht were determined by single-crystal XRD. The obtained a new crystallographic and thermal (TG/DTA) information combined with the crystal lattice energy calculations allowed to reveal the features of the N-substituted fluorinated complexes in comparison with their non-fluorinated analogs. The possibility of using the proposed compounds as MOCVD precursors was experimentally confirmed.

KW - Beta-ketoiminates

KW - MOCVD

KW - Palladium volatile precursors

KW - Single crystal X-ray diffraction analysis

KW - Thermal properties

UR - http://www.scopus.com/inward/record.url?scp=85070887180&partnerID=8YFLogxK

U2 - 10.1016/j.poly.2019.07.039

DO - 10.1016/j.poly.2019.07.039

M3 - Article

AN - SCOPUS:85070887180

VL - 171

SP - 455

EP - 463

JO - Polyhedron

JF - Polyhedron

SN - 0277-5387

ER -