TY - JOUR

T1 - Thermodynamic Study of a Volatile Complex of Magnesium Benzoyltrifluoroacetonate with N,N,N',N'-Tetramethylethylenediamine

AU - Vikulova, E. S.

AU - Sysoev, S. V.

AU - Sartakova, A. V.

AU - Rikhter, E. A.

AU - Rogov, V. A.

AU - Nazarova, A. A.

AU - Zelenina, L. N.

AU - Morozova, N. B.

N1 - This work was supported by the Russian Science Foundation, project no. 21-73-00252.

PY - 2023/2

Y1 - 2023/2

N2 - To expand the library of volatile magnesium precursors certified for effective use in chemical gas-phase deposition of the corresponding oxide or fluoride layers, a thermodynamic study of the mixed ligand complex Mg(tmeda)(btfac)2 (tmeda is N,N,N',N'-tetramethylethylenediamine, btfac is benzoyl trifluoroacetonate) have been performed. The melting process has been studied using DSC (T m = 459.4 ± 0.3 K, ΔmH°4594= 42.9 ± 0.4 kJ/mol); the sublimation process has been studied using the flow (transfer) method in the temperature range 407–447 K (ΔsublH°427= 163 ± 6 kJ/mol, Δsubl S 427 = 293 ± 14 J/(mol K)). The substance passes into the gas phase with partial decomposition. Thermodynamic modeling of the composition of condensed phases formed from Mg(tmeda)(btfac)2 with the addition of H2 or O2 has been performed depending on the temperature (700–1300 K), total pressure (133–13 332 Pa), and the ratio of the reagent gas to the precursor (0–300). The data obtained can be used to determine the experimental parameters of the processes for obtaining functional layers. Comparison of the results with a similar trifluoroacetylacetonate complex made it possible to quantitatively reveal the effect of replacing the methyl group in the anionic ligand with a phenyl one.

AB - To expand the library of volatile magnesium precursors certified for effective use in chemical gas-phase deposition of the corresponding oxide or fluoride layers, a thermodynamic study of the mixed ligand complex Mg(tmeda)(btfac)2 (tmeda is N,N,N',N'-tetramethylethylenediamine, btfac is benzoyl trifluoroacetonate) have been performed. The melting process has been studied using DSC (T m = 459.4 ± 0.3 K, ΔmH°4594= 42.9 ± 0.4 kJ/mol); the sublimation process has been studied using the flow (transfer) method in the temperature range 407–447 K (ΔsublH°427= 163 ± 6 kJ/mol, Δsubl S 427 = 293 ± 14 J/(mol K)). The substance passes into the gas phase with partial decomposition. Thermodynamic modeling of the composition of condensed phases formed from Mg(tmeda)(btfac)2 with the addition of H2 or O2 has been performed depending on the temperature (700–1300 K), total pressure (133–13 332 Pa), and the ratio of the reagent gas to the precursor (0–300). The data obtained can be used to determine the experimental parameters of the processes for obtaining functional layers. Comparison of the results with a similar trifluoroacetylacetonate complex made it possible to quantitatively reveal the effect of replacing the methyl group in the anionic ligand with a phenyl one.

KW - DSC

KW - phase transformations

KW - saturated vapor pressure

KW - thermodynamic modeling

KW - volatile precursors

UR - https://www.scopus.com/record/display.uri?eid=2-s2.0-85171537642&origin=inward&txGid=71a9b53e20117e5aa4cb19e66273cec6

UR - https://www.mendeley.com/catalogue/dd0b8551-576d-3c79-b6af-5aa90c8906ea/

U2 - 10.1134/S003602362260232X

DO - 10.1134/S003602362260232X

M3 - Article

VL - 68

SP - 133

EP - 139

JO - Russian Journal of Inorganic Chemistry

JF - Russian Journal of Inorganic Chemistry

SN - 0036-0236

IS - 2

ER -