Research output: Contribution to journal › Article › peer-review
Thermodynamic Study of a Volatile Complex of Magnesium Benzoyltrifluoroacetonate with N,N,N',N'-Tetramethylethylenediamine. / Vikulova, E. S.; Sysoev, S. V.; Sartakova, A. V. et al.
In: Russian Journal of Inorganic Chemistry, Vol. 68, No. 2, 02.2023, p. 133-139.Research output: Contribution to journal › Article › peer-review
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TY - JOUR
T1 - Thermodynamic Study of a Volatile Complex of Magnesium Benzoyltrifluoroacetonate with N,N,N',N'-Tetramethylethylenediamine
AU - Vikulova, E. S.
AU - Sysoev, S. V.
AU - Sartakova, A. V.
AU - Rikhter, E. A.
AU - Rogov, V. A.
AU - Nazarova, A. A.
AU - Zelenina, L. N.
AU - Morozova, N. B.
N1 - This work was supported by the Russian Science Foundation, project no. 21-73-00252.
PY - 2023/2
Y1 - 2023/2
N2 - To expand the library of volatile magnesium precursors certified for effective use in chemical gas-phase deposition of the corresponding oxide or fluoride layers, a thermodynamic study of the mixed ligand complex Mg(tmeda)(btfac)2 (tmeda is N,N,N',N'-tetramethylethylenediamine, btfac is benzoyl trifluoroacetonate) have been performed. The melting process has been studied using DSC (T m = 459.4 ± 0.3 K, ΔmH°4594= 42.9 ± 0.4 kJ/mol); the sublimation process has been studied using the flow (transfer) method in the temperature range 407–447 K (ΔsublH°427= 163 ± 6 kJ/mol, Δsubl S 427 = 293 ± 14 J/(mol K)). The substance passes into the gas phase with partial decomposition. Thermodynamic modeling of the composition of condensed phases formed from Mg(tmeda)(btfac)2 with the addition of H2 or O2 has been performed depending on the temperature (700–1300 K), total pressure (133–13 332 Pa), and the ratio of the reagent gas to the precursor (0–300). The data obtained can be used to determine the experimental parameters of the processes for obtaining functional layers. Comparison of the results with a similar trifluoroacetylacetonate complex made it possible to quantitatively reveal the effect of replacing the methyl group in the anionic ligand with a phenyl one.
AB - To expand the library of volatile magnesium precursors certified for effective use in chemical gas-phase deposition of the corresponding oxide or fluoride layers, a thermodynamic study of the mixed ligand complex Mg(tmeda)(btfac)2 (tmeda is N,N,N',N'-tetramethylethylenediamine, btfac is benzoyl trifluoroacetonate) have been performed. The melting process has been studied using DSC (T m = 459.4 ± 0.3 K, ΔmH°4594= 42.9 ± 0.4 kJ/mol); the sublimation process has been studied using the flow (transfer) method in the temperature range 407–447 K (ΔsublH°427= 163 ± 6 kJ/mol, Δsubl S 427 = 293 ± 14 J/(mol K)). The substance passes into the gas phase with partial decomposition. Thermodynamic modeling of the composition of condensed phases formed from Mg(tmeda)(btfac)2 with the addition of H2 or O2 has been performed depending on the temperature (700–1300 K), total pressure (133–13 332 Pa), and the ratio of the reagent gas to the precursor (0–300). The data obtained can be used to determine the experimental parameters of the processes for obtaining functional layers. Comparison of the results with a similar trifluoroacetylacetonate complex made it possible to quantitatively reveal the effect of replacing the methyl group in the anionic ligand with a phenyl one.
KW - DSC
KW - phase transformations
KW - saturated vapor pressure
KW - thermodynamic modeling
KW - volatile precursors
UR - https://www.scopus.com/record/display.uri?eid=2-s2.0-85171537642&origin=inward&txGid=71a9b53e20117e5aa4cb19e66273cec6
UR - https://www.mendeley.com/catalogue/dd0b8551-576d-3c79-b6af-5aa90c8906ea/
U2 - 10.1134/S003602362260232X
DO - 10.1134/S003602362260232X
M3 - Article
VL - 68
SP - 133
EP - 139
JO - Russian Journal of Inorganic Chemistry
JF - Russian Journal of Inorganic Chemistry
SN - 0036-0236
IS - 2
ER -
ID: 59138278