Результаты исследований: Публикации в книгах, отчётах, сборниках, трудах конференций › статья в сборнике материалов конференции › научная › Рецензирование
Thermochemical High-ordered Surface Structure Formation with an Astigmatic Gaussian Beam on Metal Thin Films. / Dostovalov, A. V.; Korolkov, V. P.; Terentyev, V. S. и др.
2019 PhotonIcs and Electromagnetics Research Symposium - Spring, PIERS-Spring 2019 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2019. стр. 3269-3272 9017747 (Progress in Electromagnetics Research Symposium; Том 2019-June).Результаты исследований: Публикации в книгах, отчётах, сборниках, трудах конференций › статья в сборнике материалов конференции › научная › Рецензирование
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TY - GEN
T1 - Thermochemical High-ordered Surface Structure Formation with an Astigmatic Gaussian Beam on Metal Thin Films
AU - Dostovalov, A. V.
AU - Korolkov, V. P.
AU - Terentyev, V. S.
AU - Bronnikov, K. A.
AU - Babin, S. A.
PY - 2019/6
Y1 - 2019/6
N2 - We present the results of high-ordered surface structure formation by femtosecond laser pulses (\lambda =1026 nm, \tau =232 fs) using an astigmatic Gaussian beam on the surface of thin metal films (thickness 30-40 nm) of Cr and Hf sputtered on the glass substrate. The difference in the structure quality and formation performance between the cases of Cr and Hf metal films was analyzed. The fabrication productivity increase by an order of magnitude was achieved in the case of Hf metal film.
AB - We present the results of high-ordered surface structure formation by femtosecond laser pulses (\lambda =1026 nm, \tau =232 fs) using an astigmatic Gaussian beam on the surface of thin metal films (thickness 30-40 nm) of Cr and Hf sputtered on the glass substrate. The difference in the structure quality and formation performance between the cases of Cr and Hf metal films was analyzed. The fabrication productivity increase by an order of magnitude was achieved in the case of Hf metal film.
UR - http://www.scopus.com/inward/record.url?scp=85081996294&partnerID=8YFLogxK
U2 - 10.1109/PIERS-Spring46901.2019.9017747
DO - 10.1109/PIERS-Spring46901.2019.9017747
M3 - Conference contribution
AN - SCOPUS:85081996294
T3 - Progress in Electromagnetics Research Symposium
SP - 3269
EP - 3272
BT - 2019 PhotonIcs and Electromagnetics Research Symposium - Spring, PIERS-Spring 2019 - Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2019 PhotonIcs and Electromagnetics Research Symposium - Spring, PIERS-Spring 2019
Y2 - 17 June 2019 through 20 June 2019
ER -
ID: 23879425