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Thermochemical High-ordered Surface Structure Formation with an Astigmatic Gaussian Beam on Metal Thin Films. / Dostovalov, A. V.; Korolkov, V. P.; Terentyev, V. S. et al.

2019 PhotonIcs and Electromagnetics Research Symposium - Spring, PIERS-Spring 2019 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2019. p. 3269-3272 9017747 (Progress in Electromagnetics Research Symposium; Vol. 2019-June).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review

Harvard

Dostovalov, AV, Korolkov, VP, Terentyev, VS, Bronnikov, KA & Babin, SA 2019, Thermochemical High-ordered Surface Structure Formation with an Astigmatic Gaussian Beam on Metal Thin Films. in 2019 PhotonIcs and Electromagnetics Research Symposium - Spring, PIERS-Spring 2019 - Proceedings., 9017747, Progress in Electromagnetics Research Symposium, vol. 2019-June, Institute of Electrical and Electronics Engineers Inc., pp. 3269-3272, 2019 PhotonIcs and Electromagnetics Research Symposium - Spring, PIERS-Spring 2019, Rome, Italy, 17.06.2019. https://doi.org/10.1109/PIERS-Spring46901.2019.9017747

APA

Dostovalov, A. V., Korolkov, V. P., Terentyev, V. S., Bronnikov, K. A., & Babin, S. A. (2019). Thermochemical High-ordered Surface Structure Formation with an Astigmatic Gaussian Beam on Metal Thin Films. In 2019 PhotonIcs and Electromagnetics Research Symposium - Spring, PIERS-Spring 2019 - Proceedings (pp. 3269-3272). [9017747] (Progress in Electromagnetics Research Symposium; Vol. 2019-June). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/PIERS-Spring46901.2019.9017747

Vancouver

Dostovalov AV, Korolkov VP, Terentyev VS, Bronnikov KA, Babin SA. Thermochemical High-ordered Surface Structure Formation with an Astigmatic Gaussian Beam on Metal Thin Films. In 2019 PhotonIcs and Electromagnetics Research Symposium - Spring, PIERS-Spring 2019 - Proceedings. Institute of Electrical and Electronics Engineers Inc. 2019. p. 3269-3272. 9017747. (Progress in Electromagnetics Research Symposium). doi: 10.1109/PIERS-Spring46901.2019.9017747

Author

Dostovalov, A. V. ; Korolkov, V. P. ; Terentyev, V. S. et al. / Thermochemical High-ordered Surface Structure Formation with an Astigmatic Gaussian Beam on Metal Thin Films. 2019 PhotonIcs and Electromagnetics Research Symposium - Spring, PIERS-Spring 2019 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2019. pp. 3269-3272 (Progress in Electromagnetics Research Symposium).

BibTeX

@inproceedings{024d6e3a75a442ad9727c98d894124e9,
title = "Thermochemical High-ordered Surface Structure Formation with an Astigmatic Gaussian Beam on Metal Thin Films",
abstract = "We present the results of high-ordered surface structure formation by femtosecond laser pulses (\lambda =1026 nm, \tau =232 fs) using an astigmatic Gaussian beam on the surface of thin metal films (thickness 30-40 nm) of Cr and Hf sputtered on the glass substrate. The difference in the structure quality and formation performance between the cases of Cr and Hf metal films was analyzed. The fabrication productivity increase by an order of magnitude was achieved in the case of Hf metal film.",
author = "Dostovalov, {A. V.} and Korolkov, {V. P.} and Terentyev, {V. S.} and Bronnikov, {K. A.} and Babin, {S. A.}",
year = "2019",
month = jun,
doi = "10.1109/PIERS-Spring46901.2019.9017747",
language = "English",
series = "Progress in Electromagnetics Research Symposium",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "3269--3272",
booktitle = "2019 PhotonIcs and Electromagnetics Research Symposium - Spring, PIERS-Spring 2019 - Proceedings",
address = "United States",
note = "2019 PhotonIcs and Electromagnetics Research Symposium - Spring, PIERS-Spring 2019 ; Conference date: 17-06-2019 Through 20-06-2019",

}

RIS

TY - GEN

T1 - Thermochemical High-ordered Surface Structure Formation with an Astigmatic Gaussian Beam on Metal Thin Films

AU - Dostovalov, A. V.

AU - Korolkov, V. P.

AU - Terentyev, V. S.

AU - Bronnikov, K. A.

AU - Babin, S. A.

PY - 2019/6

Y1 - 2019/6

N2 - We present the results of high-ordered surface structure formation by femtosecond laser pulses (\lambda =1026 nm, \tau =232 fs) using an astigmatic Gaussian beam on the surface of thin metal films (thickness 30-40 nm) of Cr and Hf sputtered on the glass substrate. The difference in the structure quality and formation performance between the cases of Cr and Hf metal films was analyzed. The fabrication productivity increase by an order of magnitude was achieved in the case of Hf metal film.

AB - We present the results of high-ordered surface structure formation by femtosecond laser pulses (\lambda =1026 nm, \tau =232 fs) using an astigmatic Gaussian beam on the surface of thin metal films (thickness 30-40 nm) of Cr and Hf sputtered on the glass substrate. The difference in the structure quality and formation performance between the cases of Cr and Hf metal films was analyzed. The fabrication productivity increase by an order of magnitude was achieved in the case of Hf metal film.

UR - http://www.scopus.com/inward/record.url?scp=85081996294&partnerID=8YFLogxK

U2 - 10.1109/PIERS-Spring46901.2019.9017747

DO - 10.1109/PIERS-Spring46901.2019.9017747

M3 - Conference contribution

AN - SCOPUS:85081996294

T3 - Progress in Electromagnetics Research Symposium

SP - 3269

EP - 3272

BT - 2019 PhotonIcs and Electromagnetics Research Symposium - Spring, PIERS-Spring 2019 - Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2019 PhotonIcs and Electromagnetics Research Symposium - Spring, PIERS-Spring 2019

Y2 - 17 June 2019 through 20 June 2019

ER -

ID: 23879425