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Optical properties of Si nanocrystals formed with laser pulse annealing. / Volodin, V. A.
в: Materials Today: Proceedings, Том 4, № 11, 2017, стр. 11402-11405.Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
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TY - JOUR
T1 - Optical properties of Si nanocrystals formed with laser pulse annealing
AU - Volodin, V. A.
PY - 2017
Y1 - 2017
N2 - Nano- and femtosecond laser pulse annealings were applied for crystallization of thin amorphous Si films and amorphous Si nanoclusters in silicon-rich nitride and oxide films. Laser assisted formation of amorphous Si nanoclusters in the non-stoichiometric dielectric films was observed. Non-thermal effects in crystallization of amorphous Si by femtosecond annealing were supposed. This approach is applicable for the creation of dielectric films with Si nanoclusters on non-refractory substrates.
AB - Nano- and femtosecond laser pulse annealings were applied for crystallization of thin amorphous Si films and amorphous Si nanoclusters in silicon-rich nitride and oxide films. Laser assisted formation of amorphous Si nanoclusters in the non-stoichiometric dielectric films was observed. Non-thermal effects in crystallization of amorphous Si by femtosecond annealing were supposed. This approach is applicable for the creation of dielectric films with Si nanoclusters on non-refractory substrates.
KW - hydrogenated amorphous silicon
KW - pulse annealing
KW - Raman scattering
KW - Silicon nanocrystals
KW - silicon nitride
KW - silicon oxide
KW - CRYSTALLIZATION
KW - SILICON FILMS
KW - SPECTROSCOPY
UR - http://www.scopus.com/inward/record.url?scp=85032007438&partnerID=8YFLogxK
U2 - 10.1016/j.matpr.2017.09.017
DO - 10.1016/j.matpr.2017.09.017
M3 - Article
AN - SCOPUS:85032007438
VL - 4
SP - 11402
EP - 11405
JO - Materials Today: Proceedings
JF - Materials Today: Proceedings
SN - 2214-7853
IS - 11
ER -
ID: 9047798