TY - JOUR

T1 - Optical and electrical properties of synthetic single-crystal diamond under high-fluence ion irradiation

AU - Borisov, A. M.

AU - Kazakov, V. A.

AU - Mashkova, E. S.

AU - Ovchinnikov, M. A.

AU - Palyanov, Yu N.

AU - Popov, V. P.

AU - Shmytkova, E. A.

PY - 2017/5/1

Y1 - 2017/5/1

N2 - The modification of the (111) face of synthetic diamond under high-fluence (≥1018 ion/cm2) 30-keV Ar+ irradiation is studied experimentally. It is found that ion irradiation at room temperature results in the formation of a low-conductivity surface layer. Heat treatment when the target temperature is increased to 400°C results in a more than ten-fold exponential drop in the layer resistance, as compared to its value at room temperature. If the temperature of the irradiated diamond is increased from 30 to 400°C the layer resistance of the ion-induced conductive layer drops by more than two orders of magnitude to the level corresponding to the conductivity of graphite-like materials. The Raman spectra of the ion-induced conductive surface layer reflect the processes of structural disorder—sp2-carbon ordering and strong changes in the optical transmittance of diamond after ion irradiation.

AB - The modification of the (111) face of synthetic diamond under high-fluence (≥1018 ion/cm2) 30-keV Ar+ irradiation is studied experimentally. It is found that ion irradiation at room temperature results in the formation of a low-conductivity surface layer. Heat treatment when the target temperature is increased to 400°C results in a more than ten-fold exponential drop in the layer resistance, as compared to its value at room temperature. If the temperature of the irradiated diamond is increased from 30 to 400°C the layer resistance of the ion-induced conductive layer drops by more than two orders of magnitude to the level corresponding to the conductivity of graphite-like materials. The Raman spectra of the ion-induced conductive surface layer reflect the processes of structural disorder—sp2-carbon ordering and strong changes in the optical transmittance of diamond after ion irradiation.

KW - high-fluence ion irradiation

KW - optical transmittance

KW - Raman spectra

KW - resistivity

KW - sheet resistance

KW - surface sheet

KW - synthetic diamond

KW - IMPLANTATION

KW - AMORPHOUS-CARBON

KW - RESISTIVITY

KW - LAYERS

UR - http://www.scopus.com/inward/record.url?scp=85020510291&partnerID=8YFLogxK

U2 - 10.1134/S1027451017030211

DO - 10.1134/S1027451017030211

M3 - Article

AN - SCOPUS:85020510291

VL - 11

SP - 619

EP - 624

JO - Journal of Surface Investigation

JF - Journal of Surface Investigation

SN - 1027-4510

IS - 3

ER -