On the Influence of a Faraday Shield on the Vortex Electric Field in a Radio-Frequency Plasma Generator

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On the Influence of a Faraday Shield on the Vortex Electric Field in a Radio-Frequency Plasma Generator. / Akhmetov, T. D.; Ivanov, A. A.; Shikhovtsev, I. V.

в: Plasma Physics Reports, Том 47, № 7, 07.2021, стр. 732-741.

Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование

BibTeX

@article{71b29a19062949adb99206af51e63a20,

title = "On the Influence of a Faraday Shield on the Vortex Electric Field in a Radio-Frequency Plasma Generator",

abstract = "In terms of a two-dimensional quasi-stationary model, an exact solution for the fields inside a circular solenoid with an alternating current and an inner coaxial thin-walled cylindrical shield with longitudinal slots of finite width is obtained. The solution of this problem allows one to estimate the influence of the Faraday shield on the profiles of the magnetic and electric fields in the radio-frequency plasma generator.",

keywords = "antenna, magnetostatics, plasma generator, quasi-stationary approximation, shield, solenoid, vortex field",

author = "Akhmetov, {T. D.} and Ivanov, {A. A.} and Shikhovtsev, {I. V.}",

note = "Funding Information: The authors are grateful to Dr. V.I. Davydenko for the interest in this work and useful remarks. Publisher Copyright: {\textcopyright} 2021, Pleiades Publishing, Ltd.",

year = "2021",

month = jul,

doi = "10.1134/S1063780X21070011",

language = "English",

volume = "47",

pages = "732--741",

journal = "Plasma Physics Reports",

issn = "1063-780X",

publisher = "PLEIADES PUBLISHING INC",

number = "7",

}

RIS

TY - JOUR

T1 - On the Influence of a Faraday Shield on the Vortex Electric Field in a Radio-Frequency Plasma Generator

AU - Akhmetov, T. D.

AU - Ivanov, A. A.

AU - Shikhovtsev, I. V.

PY - 2021/7

Y1 - 2021/7

N2 - In terms of a two-dimensional quasi-stationary model, an exact solution for the fields inside a circular solenoid with an alternating current and an inner coaxial thin-walled cylindrical shield with longitudinal slots of finite width is obtained. The solution of this problem allows one to estimate the influence of the Faraday shield on the profiles of the magnetic and electric fields in the radio-frequency plasma generator.

AB - In terms of a two-dimensional quasi-stationary model, an exact solution for the fields inside a circular solenoid with an alternating current and an inner coaxial thin-walled cylindrical shield with longitudinal slots of finite width is obtained. The solution of this problem allows one to estimate the influence of the Faraday shield on the profiles of the magnetic and electric fields in the radio-frequency plasma generator.

KW - antenna

KW - magnetostatics

KW - plasma generator

KW - quasi-stationary approximation

KW - shield

KW - solenoid

KW - vortex field

UR - http://www.scopus.com/inward/record.url?scp=85112004889&partnerID=8YFLogxK

U2 - 10.1134/S1063780X21070011

DO - 10.1134/S1063780X21070011

M3 - Article

AN - SCOPUS:85112004889

VL - 47

SP - 732

EP - 741

JO - Plasma Physics Reports

JF - Plasma Physics Reports

SN - 1063-780X

IS - 7

ER -

ID: 33990918