Research output: Contribution to journal › Article › peer-review
On the Influence of a Faraday Shield on the Vortex Electric Field in a Radio-Frequency Plasma Generator. / Akhmetov, T. D.; Ivanov, A. A.; Shikhovtsev, I. V.
In: Plasma Physics Reports, Vol. 47, No. 7, 07.2021, p. 732-741.Research output: Contribution to journal › Article › peer-review
}
TY - JOUR
T1 - On the Influence of a Faraday Shield on the Vortex Electric Field in a Radio-Frequency Plasma Generator
AU - Akhmetov, T. D.
AU - Ivanov, A. A.
AU - Shikhovtsev, I. V.
N1 - Funding Information: The authors are grateful to Dr. V.I. Davydenko for the interest in this work and useful remarks. Publisher Copyright: © 2021, Pleiades Publishing, Ltd.
PY - 2021/7
Y1 - 2021/7
N2 - In terms of a two-dimensional quasi-stationary model, an exact solution for the fields inside a circular solenoid with an alternating current and an inner coaxial thin-walled cylindrical shield with longitudinal slots of finite width is obtained. The solution of this problem allows one to estimate the influence of the Faraday shield on the profiles of the magnetic and electric fields in the radio-frequency plasma generator.
AB - In terms of a two-dimensional quasi-stationary model, an exact solution for the fields inside a circular solenoid with an alternating current and an inner coaxial thin-walled cylindrical shield with longitudinal slots of finite width is obtained. The solution of this problem allows one to estimate the influence of the Faraday shield on the profiles of the magnetic and electric fields in the radio-frequency plasma generator.
KW - antenna
KW - magnetostatics
KW - plasma generator
KW - quasi-stationary approximation
KW - shield
KW - solenoid
KW - vortex field
UR - http://www.scopus.com/inward/record.url?scp=85112004889&partnerID=8YFLogxK
U2 - 10.1134/S1063780X21070011
DO - 10.1134/S1063780X21070011
M3 - Article
AN - SCOPUS:85112004889
VL - 47
SP - 732
EP - 741
JO - Plasma Physics Reports
JF - Plasma Physics Reports
SN - 1063-780X
IS - 7
ER -
ID: 33990918