Standard

Formation of thermochemical laser-induced periodic structures on titanium films in a nitrogen-rich atmosphere. / Bronnikov, Kirill; Dostovalov, Alexander; Okotrub, Konstantin и др.

Advanced Laser Processing and Manufacturing V. ред. / Rongshi Xiao; Minghui Hong; Jianhua Yao; Yuji Sano. SPIE, 2021. 118920W (Proceedings of SPIE - The International Society for Optical Engineering; Том 11892).

Результаты исследований: Публикации в книгах, отчётах, сборниках, трудах конференцийстатья в сборнике материалов конференциинаучнаяРецензирование

Harvard

Bronnikov, K, Dostovalov, A, Okotrub, K, Kuchmizhak, A, Korolkov, V & Babin, S 2021, Formation of thermochemical laser-induced periodic structures on titanium films in a nitrogen-rich atmosphere. в R Xiao, M Hong, J Yao & Y Sano (ред.), Advanced Laser Processing and Manufacturing V., 118920W, Proceedings of SPIE - The International Society for Optical Engineering, Том. 11892, SPIE, Advanced Laser Processing and Manufacturing V 2021, Nantong, Китай, 11.10.2021. https://doi.org/10.1117/12.2601459

APA

Bronnikov, K., Dostovalov, A., Okotrub, K., Kuchmizhak, A., Korolkov, V., & Babin, S. (2021). Formation of thermochemical laser-induced periodic structures on titanium films in a nitrogen-rich atmosphere. в R. Xiao, M. Hong, J. Yao, & Y. Sano (Ред.), Advanced Laser Processing and Manufacturing V [118920W] (Proceedings of SPIE - The International Society for Optical Engineering; Том 11892). SPIE. https://doi.org/10.1117/12.2601459

Vancouver

Bronnikov K, Dostovalov A, Okotrub K, Kuchmizhak A, Korolkov V, Babin S. Formation of thermochemical laser-induced periodic structures on titanium films in a nitrogen-rich atmosphere. в Xiao R, Hong M, Yao J, Sano Y, Редакторы, Advanced Laser Processing and Manufacturing V. SPIE. 2021. 118920W. (Proceedings of SPIE - The International Society for Optical Engineering). doi: 10.1117/12.2601459

Author

Bronnikov, Kirill ; Dostovalov, Alexander ; Okotrub, Konstantin и др. / Formation of thermochemical laser-induced periodic structures on titanium films in a nitrogen-rich atmosphere. Advanced Laser Processing and Manufacturing V. Редактор / Rongshi Xiao ; Minghui Hong ; Jianhua Yao ; Yuji Sano. SPIE, 2021. (Proceedings of SPIE - The International Society for Optical Engineering).

BibTeX

@inproceedings{5f1580bffcef4b6480da9b32a0f3a302,
title = "Formation of thermochemical laser-induced periodic structures on titanium films in a nitrogen-rich atmosphere",
abstract = "Recently, highly regular thermochemical laser-induced periodic surface structures (TLIPSS) have become the subject of active studies. TLIPSS are formed in the interference maxima due to the local oxidation of the material irradiated with ultrashort laser pulses and are characterized by the elevation of the relief that forms parallel oxide protrusions. The gas surrounding is expected to affect the morphology and chemical composition of the resulting TLIPSS; however, such effects were rarely studied so far. Here we present the results of the TLIPSS fabrication on glass-supported Si-Ti bilayer films using an astigmatic Gaussian IR femtosecond beam both in air and a nitrogen-rich atmosphere. The formation of ordered TLIPSS with the period of ≈ 920 nm is observed at slow scanning speeds (∼1 μm/s) and low fluences in a nitrogen-rich atmosphere. Raman spectroscopy revealed the presence of TiO2 (rutile) peaks, as well as bands centered at 280 cm-1 and 320 cm-1, which can be related to TiN in amorphous and polycrystalline phase. ",
keywords = "Femtosecond laser, Laser-induced periodic surface structures, Metal nitrides, Thin films",
author = "Kirill Bronnikov and Alexander Dostovalov and Konstantin Okotrub and Aleksandr Kuchmizhak and Victor Korolkov and Sergey Babin",
note = "Funding Information: The work was supported by the Russian Science Foundation grant (No. 21-72-20162). In the research, we used the equipment of the Multiple-Access Centre of the Far Eastern Federal University (FEFU). Publisher Copyright: {\textcopyright} 2021 SPIE.; Advanced Laser Processing and Manufacturing V 2021 ; Conference date: 11-10-2021 Through 12-10-2021",
year = "2021",
doi = "10.1117/12.2601459",
language = "English",
isbn = "9781510646339",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Rongshi Xiao and Minghui Hong and Jianhua Yao and Yuji Sano",
booktitle = "Advanced Laser Processing and Manufacturing V",
address = "United States",

}

RIS

TY - GEN

T1 - Formation of thermochemical laser-induced periodic structures on titanium films in a nitrogen-rich atmosphere

AU - Bronnikov, Kirill

AU - Dostovalov, Alexander

AU - Okotrub, Konstantin

AU - Kuchmizhak, Aleksandr

AU - Korolkov, Victor

AU - Babin, Sergey

N1 - Funding Information: The work was supported by the Russian Science Foundation grant (No. 21-72-20162). In the research, we used the equipment of the Multiple-Access Centre of the Far Eastern Federal University (FEFU). Publisher Copyright: © 2021 SPIE.

PY - 2021

Y1 - 2021

N2 - Recently, highly regular thermochemical laser-induced periodic surface structures (TLIPSS) have become the subject of active studies. TLIPSS are formed in the interference maxima due to the local oxidation of the material irradiated with ultrashort laser pulses and are characterized by the elevation of the relief that forms parallel oxide protrusions. The gas surrounding is expected to affect the morphology and chemical composition of the resulting TLIPSS; however, such effects were rarely studied so far. Here we present the results of the TLIPSS fabrication on glass-supported Si-Ti bilayer films using an astigmatic Gaussian IR femtosecond beam both in air and a nitrogen-rich atmosphere. The formation of ordered TLIPSS with the period of ≈ 920 nm is observed at slow scanning speeds (∼1 μm/s) and low fluences in a nitrogen-rich atmosphere. Raman spectroscopy revealed the presence of TiO2 (rutile) peaks, as well as bands centered at 280 cm-1 and 320 cm-1, which can be related to TiN in amorphous and polycrystalline phase.

AB - Recently, highly regular thermochemical laser-induced periodic surface structures (TLIPSS) have become the subject of active studies. TLIPSS are formed in the interference maxima due to the local oxidation of the material irradiated with ultrashort laser pulses and are characterized by the elevation of the relief that forms parallel oxide protrusions. The gas surrounding is expected to affect the morphology and chemical composition of the resulting TLIPSS; however, such effects were rarely studied so far. Here we present the results of the TLIPSS fabrication on glass-supported Si-Ti bilayer films using an astigmatic Gaussian IR femtosecond beam both in air and a nitrogen-rich atmosphere. The formation of ordered TLIPSS with the period of ≈ 920 nm is observed at slow scanning speeds (∼1 μm/s) and low fluences in a nitrogen-rich atmosphere. Raman spectroscopy revealed the presence of TiO2 (rutile) peaks, as well as bands centered at 280 cm-1 and 320 cm-1, which can be related to TiN in amorphous and polycrystalline phase.

KW - Femtosecond laser

KW - Laser-induced periodic surface structures

KW - Metal nitrides

KW - Thin films

UR - http://www.scopus.com/inward/record.url?scp=85122465514&partnerID=8YFLogxK

UR - https://www.mendeley.com/catalogue/0a054c49-f756-3d9b-8c68-0ea495e9be18/

U2 - 10.1117/12.2601459

DO - 10.1117/12.2601459

M3 - Conference contribution

AN - SCOPUS:85122465514

SN - 9781510646339

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Advanced Laser Processing and Manufacturing V

A2 - Xiao, Rongshi

A2 - Hong, Minghui

A2 - Yao, Jianhua

A2 - Sano, Yuji

PB - SPIE

T2 - Advanced Laser Processing and Manufacturing V 2021

Y2 - 11 October 2021 through 12 October 2021

ER -

ID: 35173730