Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review
Formation of thermochemical laser-induced periodic structures on titanium films in a nitrogen-rich atmosphere. / Bronnikov, Kirill; Dostovalov, Alexander; Okotrub, Konstantin et al.
Advanced Laser Processing and Manufacturing V. ed. / Rongshi Xiao; Minghui Hong; Jianhua Yao; Yuji Sano. SPIE, 2021. 118920W (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 11892).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review
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TY - GEN
T1 - Formation of thermochemical laser-induced periodic structures on titanium films in a nitrogen-rich atmosphere
AU - Bronnikov, Kirill
AU - Dostovalov, Alexander
AU - Okotrub, Konstantin
AU - Kuchmizhak, Aleksandr
AU - Korolkov, Victor
AU - Babin, Sergey
N1 - Funding Information: The work was supported by the Russian Science Foundation grant (No. 21-72-20162). In the research, we used the equipment of the Multiple-Access Centre of the Far Eastern Federal University (FEFU). Publisher Copyright: © 2021 SPIE.
PY - 2021
Y1 - 2021
N2 - Recently, highly regular thermochemical laser-induced periodic surface structures (TLIPSS) have become the subject of active studies. TLIPSS are formed in the interference maxima due to the local oxidation of the material irradiated with ultrashort laser pulses and are characterized by the elevation of the relief that forms parallel oxide protrusions. The gas surrounding is expected to affect the morphology and chemical composition of the resulting TLIPSS; however, such effects were rarely studied so far. Here we present the results of the TLIPSS fabrication on glass-supported Si-Ti bilayer films using an astigmatic Gaussian IR femtosecond beam both in air and a nitrogen-rich atmosphere. The formation of ordered TLIPSS with the period of ≈ 920 nm is observed at slow scanning speeds (∼1 μm/s) and low fluences in a nitrogen-rich atmosphere. Raman spectroscopy revealed the presence of TiO2 (rutile) peaks, as well as bands centered at 280 cm-1 and 320 cm-1, which can be related to TiN in amorphous and polycrystalline phase.
AB - Recently, highly regular thermochemical laser-induced periodic surface structures (TLIPSS) have become the subject of active studies. TLIPSS are formed in the interference maxima due to the local oxidation of the material irradiated with ultrashort laser pulses and are characterized by the elevation of the relief that forms parallel oxide protrusions. The gas surrounding is expected to affect the morphology and chemical composition of the resulting TLIPSS; however, such effects were rarely studied so far. Here we present the results of the TLIPSS fabrication on glass-supported Si-Ti bilayer films using an astigmatic Gaussian IR femtosecond beam both in air and a nitrogen-rich atmosphere. The formation of ordered TLIPSS with the period of ≈ 920 nm is observed at slow scanning speeds (∼1 μm/s) and low fluences in a nitrogen-rich atmosphere. Raman spectroscopy revealed the presence of TiO2 (rutile) peaks, as well as bands centered at 280 cm-1 and 320 cm-1, which can be related to TiN in amorphous and polycrystalline phase.
KW - Femtosecond laser
KW - Laser-induced periodic surface structures
KW - Metal nitrides
KW - Thin films
UR - http://www.scopus.com/inward/record.url?scp=85122465514&partnerID=8YFLogxK
UR - https://www.mendeley.com/catalogue/0a054c49-f756-3d9b-8c68-0ea495e9be18/
U2 - 10.1117/12.2601459
DO - 10.1117/12.2601459
M3 - Conference contribution
AN - SCOPUS:85122465514
SN - 9781510646339
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Advanced Laser Processing and Manufacturing V
A2 - Xiao, Rongshi
A2 - Hong, Minghui
A2 - Yao, Jianhua
A2 - Sano, Yuji
PB - SPIE
T2 - Advanced Laser Processing and Manufacturing V 2021
Y2 - 11 October 2021 through 12 October 2021
ER -
ID: 35173730