Результаты исследований: Публикации в книгах, отчётах, сборниках, трудах конференций › статья в сборнике материалов конференции › научная › Рецензирование
Formation of periodic structure on amorphous silicon films by femtosecond laser pulses. / Dostovalov, A. V.; Kuchmizhak, A. A.; Bronnikov, K. A. и др.
Proceedings - International Conference Laser Optics 2020, ICLO 2020. Institute of Electrical and Electronics Engineers Inc., 2020. 9285402 (Proceedings - International Conference Laser Optics 2020, ICLO 2020).Результаты исследований: Публикации в книгах, отчётах, сборниках, трудах конференций › статья в сборнике материалов конференции › научная › Рецензирование
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TY - GEN
T1 - Formation of periodic structure on amorphous silicon films by femtosecond laser pulses
AU - Dostovalov, A. V.
AU - Kuchmizhak, A. A.
AU - Bronnikov, K. A.
AU - Mitsai, E.
AU - Korolkov, V. P.
AU - Babin, S. A.
N1 - Funding Information: The work of A.V.D, V.P.K., S.A.B. was supported by the state budget of Russian Federation (IA&E project, reg. № AAAA-A17-117062110026-3), A.A.K and E.M. by Russian Science Foundation (grant No. 18-79-10091) and K.A.B. was supported by RFBR, project number 19-32-90235. Publisher Copyright: © 2020 IEEE.
PY - 2020/11/2
Y1 - 2020/11/2
N2 - In this paper, we report formation of laser-induced periodic surface structures (LIPSS) on amorphous silicon (a-Si) films of various thickness by their lateral scanning with fs laser pulses shaped to astigmatic Gaussian beam. Diverse LIPSS morphologies with characteristic periods ranging from 150 to 1000 nm were found to form upon variation of scanning speed and laser power.
AB - In this paper, we report formation of laser-induced periodic surface structures (LIPSS) on amorphous silicon (a-Si) films of various thickness by their lateral scanning with fs laser pulses shaped to astigmatic Gaussian beam. Diverse LIPSS morphologies with characteristic periods ranging from 150 to 1000 nm were found to form upon variation of scanning speed and laser power.
KW - amorphous silicon thin film
KW - femtosecond laser pulses
KW - laser induced periodic surface structures
UR - http://www.scopus.com/inward/record.url?scp=85099383804&partnerID=8YFLogxK
U2 - 10.1109/ICLO48556.2020.9285402
DO - 10.1109/ICLO48556.2020.9285402
M3 - Conference contribution
AN - SCOPUS:85099383804
T3 - Proceedings - International Conference Laser Optics 2020, ICLO 2020
BT - Proceedings - International Conference Laser Optics 2020, ICLO 2020
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2020 International Conference Laser Optics, ICLO 2020
Y2 - 2 November 2020 through 6 November 2020
ER -
ID: 34671603