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Formation of periodic structure on amorphous silicon films by femtosecond laser pulses. / Dostovalov, A. V.; Kuchmizhak, A. A.; Bronnikov, K. A. et al.

Proceedings - International Conference Laser Optics 2020, ICLO 2020. Institute of Electrical and Electronics Engineers Inc., 2020. 9285402 (Proceedings - International Conference Laser Optics 2020, ICLO 2020).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review

Harvard

Dostovalov, AV, Kuchmizhak, AA, Bronnikov, KA, Mitsai, E, Korolkov, VP & Babin, SA 2020, Formation of periodic structure on amorphous silicon films by femtosecond laser pulses. in Proceedings - International Conference Laser Optics 2020, ICLO 2020., 9285402, Proceedings - International Conference Laser Optics 2020, ICLO 2020, Institute of Electrical and Electronics Engineers Inc., 2020 International Conference Laser Optics, ICLO 2020, St. Petersburg, Russian Federation, 02.11.2020. https://doi.org/10.1109/ICLO48556.2020.9285402

APA

Dostovalov, A. V., Kuchmizhak, A. A., Bronnikov, K. A., Mitsai, E., Korolkov, V. P., & Babin, S. A. (2020). Formation of periodic structure on amorphous silicon films by femtosecond laser pulses. In Proceedings - International Conference Laser Optics 2020, ICLO 2020 [9285402] (Proceedings - International Conference Laser Optics 2020, ICLO 2020). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICLO48556.2020.9285402

Vancouver

Dostovalov AV, Kuchmizhak AA, Bronnikov KA, Mitsai E, Korolkov VP, Babin SA. Formation of periodic structure on amorphous silicon films by femtosecond laser pulses. In Proceedings - International Conference Laser Optics 2020, ICLO 2020. Institute of Electrical and Electronics Engineers Inc. 2020. 9285402. (Proceedings - International Conference Laser Optics 2020, ICLO 2020). doi: 10.1109/ICLO48556.2020.9285402

Author

Dostovalov, A. V. ; Kuchmizhak, A. A. ; Bronnikov, K. A. et al. / Formation of periodic structure on amorphous silicon films by femtosecond laser pulses. Proceedings - International Conference Laser Optics 2020, ICLO 2020. Institute of Electrical and Electronics Engineers Inc., 2020. (Proceedings - International Conference Laser Optics 2020, ICLO 2020).

BibTeX

@inproceedings{0afe84ac33534730bf4ebade72cad15d,
title = "Formation of periodic structure on amorphous silicon films by femtosecond laser pulses",
abstract = "In this paper, we report formation of laser-induced periodic surface structures (LIPSS) on amorphous silicon (a-Si) films of various thickness by their lateral scanning with fs laser pulses shaped to astigmatic Gaussian beam. Diverse LIPSS morphologies with characteristic periods ranging from 150 to 1000 nm were found to form upon variation of scanning speed and laser power.",
keywords = "amorphous silicon thin film, femtosecond laser pulses, laser induced periodic surface structures",
author = "Dostovalov, {A. V.} and Kuchmizhak, {A. A.} and Bronnikov, {K. A.} and E. Mitsai and Korolkov, {V. P.} and Babin, {S. A.}",
note = "Funding Information: The work of A.V.D, V.P.K., S.A.B. was supported by the state budget of Russian Federation (IA&E project, reg. № AAAA-A17-117062110026-3), A.A.K and E.M. by Russian Science Foundation (grant No. 18-79-10091) and K.A.B. was supported by RFBR, project number 19-32-90235. Publisher Copyright: {\textcopyright} 2020 IEEE.; 2020 International Conference Laser Optics, ICLO 2020 ; Conference date: 02-11-2020 Through 06-11-2020",
year = "2020",
month = nov,
day = "2",
doi = "10.1109/ICLO48556.2020.9285402",
language = "English",
series = "Proceedings - International Conference Laser Optics 2020, ICLO 2020",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "Proceedings - International Conference Laser Optics 2020, ICLO 2020",
address = "United States",

}

RIS

TY - GEN

T1 - Formation of periodic structure on amorphous silicon films by femtosecond laser pulses

AU - Dostovalov, A. V.

AU - Kuchmizhak, A. A.

AU - Bronnikov, K. A.

AU - Mitsai, E.

AU - Korolkov, V. P.

AU - Babin, S. A.

N1 - Funding Information: The work of A.V.D, V.P.K., S.A.B. was supported by the state budget of Russian Federation (IA&E project, reg. № AAAA-A17-117062110026-3), A.A.K and E.M. by Russian Science Foundation (grant No. 18-79-10091) and K.A.B. was supported by RFBR, project number 19-32-90235. Publisher Copyright: © 2020 IEEE.

PY - 2020/11/2

Y1 - 2020/11/2

N2 - In this paper, we report formation of laser-induced periodic surface structures (LIPSS) on amorphous silicon (a-Si) films of various thickness by their lateral scanning with fs laser pulses shaped to astigmatic Gaussian beam. Diverse LIPSS morphologies with characteristic periods ranging from 150 to 1000 nm were found to form upon variation of scanning speed and laser power.

AB - In this paper, we report formation of laser-induced periodic surface structures (LIPSS) on amorphous silicon (a-Si) films of various thickness by their lateral scanning with fs laser pulses shaped to astigmatic Gaussian beam. Diverse LIPSS morphologies with characteristic periods ranging from 150 to 1000 nm were found to form upon variation of scanning speed and laser power.

KW - amorphous silicon thin film

KW - femtosecond laser pulses

KW - laser induced periodic surface structures

UR - http://www.scopus.com/inward/record.url?scp=85099383804&partnerID=8YFLogxK

U2 - 10.1109/ICLO48556.2020.9285402

DO - 10.1109/ICLO48556.2020.9285402

M3 - Conference contribution

AN - SCOPUS:85099383804

T3 - Proceedings - International Conference Laser Optics 2020, ICLO 2020

BT - Proceedings - International Conference Laser Optics 2020, ICLO 2020

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2020 International Conference Laser Optics, ICLO 2020

Y2 - 2 November 2020 through 6 November 2020

ER -

ID: 34671603