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Formation of nanostructures on the surface of KTP single crystals by argon cluster ion beam. / Nikolaev, I. V.; Korobeishchikov, N. G.; Roenko, M. A.

в: Journal of Physics: Conference Series, Том 1382, № 1, 012162, 28.11.2019.

Результаты исследований: Научные публикации в периодических изданиях › статья по материалам конференции › Рецензирование

Harvard

Nikolaev, IV, Korobeishchikov, NG & Roenko, MA 2019, 'Formation of nanostructures on the surface of KTP single crystals by argon cluster ion beam', Journal of Physics: Conference Series, Том. 1382, № 1, 012162. https://doi.org/10.1088/1742-6596/1382/1/012162

APA

Nikolaev, I. V., Korobeishchikov, N. G., & Roenko, M. A. (2019). Formation of nanostructures on the surface of KTP single crystals by argon cluster ion beam. Journal of Physics: Conference Series, 1382(1), [012162]. https://doi.org/10.1088/1742-6596/1382/1/012162

Vancouver

Nikolaev IV, Korobeishchikov NG, Roenko MA. Formation of nanostructures on the surface of KTP single crystals by argon cluster ion beam. Journal of Physics: Conference Series. 2019 нояб. 28;1382(1):012162. doi: 10.1088/1742-6596/1382/1/012162

Author

Nikolaev, I. V. ; Korobeishchikov, N. G. ; Roenko, M. A. / Formation of nanostructures on the surface of KTP single crystals by argon cluster ion beam. в: Journal of Physics: Conference Series. 2019 ; Том 1382, № 1.

BibTeX

@article{dab7554663cf4ca9b80081b9ed594e33,
title = "Formation of nanostructures on the surface of KTP single crystals by argon cluster ion beam",
abstract = "In this work, the surface of potassium titanyl phosphate (KTP) single crystals has been processed by argon cluster ions having low energy per atom E/Nmean = 12.5 eV/atom. The formation of periodic nanostructures has been studied using atomic force microscopy (AFM) and the power spectral density (PSD) functions. To evaluate the processing efficiency, the dependence of the etching rate of KTP on the incident angles of cluster ions has been investigated. It is shown that the average etching rate Vetch varies between 0.46 and 1.1 nm/min with an incident angle change from 0? to 70?.",
author = "Nikolaev, {I. V.} and Korobeishchikov, {N. G.} and Roenko, {M. A.}",
year = "2019",
month = nov,
day = "28",
doi = "10.1088/1742-6596/1382/1/012162",
language = "English",
volume = "1382",
journal = "Journal of Physics: Conference Series",
issn = "1742-6588",
publisher = "IOP Publishing Ltd.",
number = "1",
note = "3th Siberian Thermophysical Seminar, STS 2019 ; Conference date: 27-08-2019 Through 29-08-2019",

}

RIS

TY - JOUR

T1 - Formation of nanostructures on the surface of KTP single crystals by argon cluster ion beam

AU - Nikolaev, I. V.

AU - Korobeishchikov, N. G.

AU - Roenko, M. A.

PY - 2019/11/28

Y1 - 2019/11/28

N2 - In this work, the surface of potassium titanyl phosphate (KTP) single crystals has been processed by argon cluster ions having low energy per atom E/Nmean = 12.5 eV/atom. The formation of periodic nanostructures has been studied using atomic force microscopy (AFM) and the power spectral density (PSD) functions. To evaluate the processing efficiency, the dependence of the etching rate of KTP on the incident angles of cluster ions has been investigated. It is shown that the average etching rate Vetch varies between 0.46 and 1.1 nm/min with an incident angle change from 0? to 70?.

AB - In this work, the surface of potassium titanyl phosphate (KTP) single crystals has been processed by argon cluster ions having low energy per atom E/Nmean = 12.5 eV/atom. The formation of periodic nanostructures has been studied using atomic force microscopy (AFM) and the power spectral density (PSD) functions. To evaluate the processing efficiency, the dependence of the etching rate of KTP on the incident angles of cluster ions has been investigated. It is shown that the average etching rate Vetch varies between 0.46 and 1.1 nm/min with an incident angle change from 0? to 70?.

UR - http://www.scopus.com/inward/record.url?scp=85077244738&partnerID=8YFLogxK

U2 - 10.1088/1742-6596/1382/1/012162

DO - 10.1088/1742-6596/1382/1/012162

M3 - Conference article

AN - SCOPUS:85077244738

VL - 1382

JO - Journal of Physics: Conference Series

JF - Journal of Physics: Conference Series

SN - 1742-6588

IS - 1

M1 - 012162

T2 - 3th Siberian Thermophysical Seminar, STS 2019

Y2 - 27 August 2019 through 29 August 2019

ER -

ID: 22870511