Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
Features of the Structure and Properties of the ta-C Coatings Deposited from Filtered Flows of the Pulsed Cathodic-Arc Discharge. / Gao, Yang; Sakhovsky, K. A.; Jiang, Shangzhe и др.
в: Eurasian Chemico-Technological Journal, Том 27, № 2, 2025, стр. 89-100.Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
}
TY - JOUR
T1 - Features of the Structure and Properties of the ta-C Coatings Deposited from Filtered Flows of the Pulsed Cathodic-Arc Discharge
AU - Gao, Yang
AU - Sakhovsky, K. A.
AU - Jiang, Shangzhe
AU - Chepkasov, S. Y.
AU - Jiang, Xiaohong
AU - Rudenkov, A. S.
AU - Makhmanov, Urol K.
AU - Piliptsou, D. G.
AU - Rogachev, A. V.
PY - 2025
Y1 - 2025
N2 - The amorphous carbon (ta-C) coatings have been deposited on the polished silicon (111) substrates using the pulsed cathodic-arc evaporation of the graphite target. A comparative analysis of the structure and properties of the ta-C coatings deposited via the pulsed cathodic-arc evaporation with different pulse voltages has been carried out. According to the Raman analyses, optimal energy modes and arc voltage for generating pulsed flows of carbon plasma have been determined. Using the electromagnetic filter enables the effective separation of the ionic and droplet components of the coating while ensuring the complete removal of the macroparticles from the plasma flow. The surface of the coatings deposited under different separation modes, as well as different discharge voltages, has been studied via scanning electron and atomic force microscopies. This leads to a twofold decrease in the surface roughness compared to the flow without filtration. In addition, an increase in the hardness and elasticity modulus of the coatings has been detected. The optical parameters of the coatings depend directly on the phase composition of the coatings, which is controlled by the sp2/sp3 ratio, and on the parameters of the microstructure (size, number and ordering of sp2 clusters). The application of filters enables the deposition of coatings composed of amorphous carbon that exhibit high mechanical and optical properties. These coatings are notably thinner when compared to those deposited from flows without filtration. This study determines the structure, mechanical, and optical properties of a-C coatings deposited with and without filtration of pulsed plasma carbon flow, maintaining a constant discharge duration.
AB - The amorphous carbon (ta-C) coatings have been deposited on the polished silicon (111) substrates using the pulsed cathodic-arc evaporation of the graphite target. A comparative analysis of the structure and properties of the ta-C coatings deposited via the pulsed cathodic-arc evaporation with different pulse voltages has been carried out. According to the Raman analyses, optimal energy modes and arc voltage for generating pulsed flows of carbon plasma have been determined. Using the electromagnetic filter enables the effective separation of the ionic and droplet components of the coating while ensuring the complete removal of the macroparticles from the plasma flow. The surface of the coatings deposited under different separation modes, as well as different discharge voltages, has been studied via scanning electron and atomic force microscopies. This leads to a twofold decrease in the surface roughness compared to the flow without filtration. In addition, an increase in the hardness and elasticity modulus of the coatings has been detected. The optical parameters of the coatings depend directly on the phase composition of the coatings, which is controlled by the sp2/sp3 ratio, and on the parameters of the microstructure (size, number and ordering of sp2 clusters). The application of filters enables the deposition of coatings composed of amorphous carbon that exhibit high mechanical and optical properties. These coatings are notably thinner when compared to those deposited from flows without filtration. This study determines the structure, mechanical, and optical properties of a-C coatings deposited with and without filtration of pulsed plasma carbon flow, maintaining a constant discharge duration.
KW - Carbon coating
KW - Clusters
KW - Morphology
KW - Nanohardness
KW - Phase
KW - Roughness
UR - https://www.mendeley.com/catalogue/1002aad3-c4e0-3bbc-9296-85b3dc5e2069/
UR - https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=105011394917&origin=inward
U2 - 10.18321/ectj1657
DO - 10.18321/ectj1657
M3 - Article
VL - 27
SP - 89
EP - 100
JO - Eurasian Chemico-Technological Journal
JF - Eurasian Chemico-Technological Journal
SN - 1562-3920
IS - 2
ER -
ID: 68614443