Результаты исследований: Публикации в книгах, отчётах, сборниках, трудах конференций › статья в сборнике материалов конференции › научная › Рецензирование
Fast formation of hybrid periodic surface structures on Hf thin-film by focused femtosecond laser beam. / Dostovalov, A. V.; Bronnikov, K. A.; Belousov, D. A. и др.
Advanced Laser Processing and Manufacturing III. ред. / Rongshi Xiao; Minghui Hong; Jian Liu; Jianhua Yao; Yuji Sano. SPIE, 2019. 111830U (Proceedings of SPIE - The International Society for Optical Engineering; Том 11183).Результаты исследований: Публикации в книгах, отчётах, сборниках, трудах конференций › статья в сборнике материалов конференции › научная › Рецензирование
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TY - GEN
T1 - Fast formation of hybrid periodic surface structures on Hf thin-film by focused femtosecond laser beam
AU - Dostovalov, A. V.
AU - Bronnikov, K. A.
AU - Belousov, D. A.
AU - Korolkov, V. P.
AU - Babin, S. A.
N1 - Publisher Copyright: © 2019 SPIE.
PY - 2019/1/1
Y1 - 2019/1/1
N2 - We present the results of high-ordered periodic surface structure formation by femtosecond laser pulses (λ = 1026 nm, τ = 232 fs) using an astigmatic Gaussian beam with a diameter of ≈100 μm on the surface of metal films (thickness of 15 nm and 150 nm) of Hf sputtered on the glass substrate. Continuous and uniform structures with a period of ≈700 nm are formed at a scanning speed up to 2000 μm/s on the film with a thickness of 15 nm. In addition, the formation of ablative periodic substructures with a period of about 160 nm oriented perpendicularly to the main ones was observed on the oxide protrusions. In the case of 150 nm thick film, defects, cracks and phase shifts accompanied a uniform structure with a period of ≈940 nm formed at a speed up to 500 μm/s.
AB - We present the results of high-ordered periodic surface structure formation by femtosecond laser pulses (λ = 1026 nm, τ = 232 fs) using an astigmatic Gaussian beam with a diameter of ≈100 μm on the surface of metal films (thickness of 15 nm and 150 nm) of Hf sputtered on the glass substrate. Continuous and uniform structures with a period of ≈700 nm are formed at a scanning speed up to 2000 μm/s on the film with a thickness of 15 nm. In addition, the formation of ablative periodic substructures with a period of about 160 nm oriented perpendicularly to the main ones was observed on the oxide protrusions. In the case of 150 nm thick film, defects, cracks and phase shifts accompanied a uniform structure with a period of ≈940 nm formed at a speed up to 500 μm/s.
KW - Femtosecond laser nanostructuring
KW - Hafnium
KW - Laser-induced periodic surface structures
KW - Surface modification
KW - laser-induced periodic surface structures
KW - surface modification
KW - femtosecond laser nanostructuring
KW - hafnium
UR - http://www.scopus.com/inward/record.url?scp=85077817126&partnerID=8YFLogxK
U2 - 10.1117/12.2537672
DO - 10.1117/12.2537672
M3 - Conference contribution
AN - SCOPUS:85077817126
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Advanced Laser Processing and Manufacturing III
A2 - Xiao, Rongshi
A2 - Hong, Minghui
A2 - Liu, Jian
A2 - Yao, Jianhua
A2 - Sano, Yuji
PB - SPIE
T2 - Advanced Laser Processing and Manufacturing III 2019
Y2 - 21 October 2019 through 22 October 2019
ER -
ID: 23124293