Standard

Fast formation of hybrid periodic surface structures on Hf thin-film by focused femtosecond laser beam. / Dostovalov, A. V.; Bronnikov, K. A.; Belousov, D. A. et al.

Advanced Laser Processing and Manufacturing III. ed. / Rongshi Xiao; Minghui Hong; Jian Liu; Jianhua Yao; Yuji Sano. SPIE, 2019. 111830U (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 11183).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review

Harvard

Dostovalov, AV, Bronnikov, KA, Belousov, DA, Korolkov, VP & Babin, SA 2019, Fast formation of hybrid periodic surface structures on Hf thin-film by focused femtosecond laser beam. in R Xiao, M Hong, J Liu, J Yao & Y Sano (eds), Advanced Laser Processing and Manufacturing III., 111830U, Proceedings of SPIE - The International Society for Optical Engineering, vol. 11183, SPIE, Advanced Laser Processing and Manufacturing III 2019, Hangzhou, China, 21.10.2019. https://doi.org/10.1117/12.2537672

APA

Dostovalov, A. V., Bronnikov, K. A., Belousov, D. A., Korolkov, V. P., & Babin, S. A. (2019). Fast formation of hybrid periodic surface structures on Hf thin-film by focused femtosecond laser beam. In R. Xiao, M. Hong, J. Liu, J. Yao, & Y. Sano (Eds.), Advanced Laser Processing and Manufacturing III [111830U] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 11183). SPIE. https://doi.org/10.1117/12.2537672

Vancouver

Dostovalov AV, Bronnikov KA, Belousov DA, Korolkov VP, Babin SA. Fast formation of hybrid periodic surface structures on Hf thin-film by focused femtosecond laser beam. In Xiao R, Hong M, Liu J, Yao J, Sano Y, editors, Advanced Laser Processing and Manufacturing III. SPIE. 2019. 111830U. (Proceedings of SPIE - The International Society for Optical Engineering). doi: 10.1117/12.2537672

Author

Dostovalov, A. V. ; Bronnikov, K. A. ; Belousov, D. A. et al. / Fast formation of hybrid periodic surface structures on Hf thin-film by focused femtosecond laser beam. Advanced Laser Processing and Manufacturing III. editor / Rongshi Xiao ; Minghui Hong ; Jian Liu ; Jianhua Yao ; Yuji Sano. SPIE, 2019. (Proceedings of SPIE - The International Society for Optical Engineering).

BibTeX

@inproceedings{72148c365f5046bcbb38c06c09897d3f,
title = "Fast formation of hybrid periodic surface structures on Hf thin-film by focused femtosecond laser beam",
abstract = "We present the results of high-ordered periodic surface structure formation by femtosecond laser pulses (λ = 1026 nm, τ = 232 fs) using an astigmatic Gaussian beam with a diameter of ≈100 μm on the surface of metal films (thickness of 15 nm and 150 nm) of Hf sputtered on the glass substrate. Continuous and uniform structures with a period of ≈700 nm are formed at a scanning speed up to 2000 μm/s on the film with a thickness of 15 nm. In addition, the formation of ablative periodic substructures with a period of about 160 nm oriented perpendicularly to the main ones was observed on the oxide protrusions. In the case of 150 nm thick film, defects, cracks and phase shifts accompanied a uniform structure with a period of ≈940 nm formed at a speed up to 500 μm/s.",
keywords = "Femtosecond laser nanostructuring, Hafnium, Laser-induced periodic surface structures, Surface modification, laser-induced periodic surface structures, surface modification, femtosecond laser nanostructuring, hafnium",
author = "Dostovalov, {A. V.} and Bronnikov, {K. A.} and Belousov, {D. A.} and Korolkov, {V. P.} and Babin, {S. A.}",
note = "Publisher Copyright: {\textcopyright} 2019 SPIE.; Advanced Laser Processing and Manufacturing III 2019 ; Conference date: 21-10-2019 Through 22-10-2019",
year = "2019",
month = jan,
day = "1",
doi = "10.1117/12.2537672",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Rongshi Xiao and Minghui Hong and Jian Liu and Jianhua Yao and Yuji Sano",
booktitle = "Advanced Laser Processing and Manufacturing III",
address = "United States",

}

RIS

TY - GEN

T1 - Fast formation of hybrid periodic surface structures on Hf thin-film by focused femtosecond laser beam

AU - Dostovalov, A. V.

AU - Bronnikov, K. A.

AU - Belousov, D. A.

AU - Korolkov, V. P.

AU - Babin, S. A.

N1 - Publisher Copyright: © 2019 SPIE.

PY - 2019/1/1

Y1 - 2019/1/1

N2 - We present the results of high-ordered periodic surface structure formation by femtosecond laser pulses (λ = 1026 nm, τ = 232 fs) using an astigmatic Gaussian beam with a diameter of ≈100 μm on the surface of metal films (thickness of 15 nm and 150 nm) of Hf sputtered on the glass substrate. Continuous and uniform structures with a period of ≈700 nm are formed at a scanning speed up to 2000 μm/s on the film with a thickness of 15 nm. In addition, the formation of ablative periodic substructures with a period of about 160 nm oriented perpendicularly to the main ones was observed on the oxide protrusions. In the case of 150 nm thick film, defects, cracks and phase shifts accompanied a uniform structure with a period of ≈940 nm formed at a speed up to 500 μm/s.

AB - We present the results of high-ordered periodic surface structure formation by femtosecond laser pulses (λ = 1026 nm, τ = 232 fs) using an astigmatic Gaussian beam with a diameter of ≈100 μm on the surface of metal films (thickness of 15 nm and 150 nm) of Hf sputtered on the glass substrate. Continuous and uniform structures with a period of ≈700 nm are formed at a scanning speed up to 2000 μm/s on the film with a thickness of 15 nm. In addition, the formation of ablative periodic substructures with a period of about 160 nm oriented perpendicularly to the main ones was observed on the oxide protrusions. In the case of 150 nm thick film, defects, cracks and phase shifts accompanied a uniform structure with a period of ≈940 nm formed at a speed up to 500 μm/s.

KW - Femtosecond laser nanostructuring

KW - Hafnium

KW - Laser-induced periodic surface structures

KW - Surface modification

KW - laser-induced periodic surface structures

KW - surface modification

KW - femtosecond laser nanostructuring

KW - hafnium

UR - http://www.scopus.com/inward/record.url?scp=85077817126&partnerID=8YFLogxK

U2 - 10.1117/12.2537672

DO - 10.1117/12.2537672

M3 - Conference contribution

AN - SCOPUS:85077817126

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Advanced Laser Processing and Manufacturing III

A2 - Xiao, Rongshi

A2 - Hong, Minghui

A2 - Liu, Jian

A2 - Yao, Jianhua

A2 - Sano, Yuji

PB - SPIE

T2 - Advanced Laser Processing and Manufacturing III 2019

Y2 - 21 October 2019 through 22 October 2019

ER -

ID: 23124293