TY - JOUR

T1 - Effect of Titanium and Molybdenum Cover on the Surface Restructuration of Diamond Single Crystal during Annealing

AU - Okotrub, Alexander V

AU - Sedelnikova, Olga V

AU - Gorodetskiy, Dmitriy V

AU - Fedorenko, Anastasiya D

AU - Asanov, Igor P

AU - Palyanov, Yury N

AU - Lapega, Alina V

AU - Gurova, Olga A

AU - Bulusheva, Lyubov G

N1 - Funding: This research is supported by the Russian Science Foundation Grant number 22-72-10097.

PY - 2023/2/16

Y1 - 2023/2/16

N2 - Diamond is an important material for electrical and electronic devices. Because the diamond is in contact with the metal in these applications, it becomes necessary to study the metal-diamond interaction and the structure of the interface, in particular, at elevated temperatures. In this work, we study the interaction of the (100) and (111) surfaces of a synthetic diamond single crystal with spattered titanium and molybdenum films. Atomic force microscopy reveals a uniform coating of titanium and the formation of flattened molybdenum nanoparticles. A thin titanium film is completely oxidized upon contact with air and passes from the oxidized state to the carbide state upon annealing in an ultrahigh vacuum at 800 °C. Molybdenum interacts with the (111) diamond surface already at 500 °C, which leads to the carbidization of its nanoparticles and catalytic graphitization of the diamond surface. This process is much slower on the (100) diamond surface; sp2-hybridized carbon is formed on the diamond and the top of molybdenum carbide nanoparticles, only when the annealing temperature is raised to 800 °C. The conductivity of the resulting sample is improved when compared to the Ti-coated diamond substrates and the Mo-coated (111) substrate annealed at 800 °C. The presented results could be useful for the development of graphene-on-diamond electronics.

AB - Diamond is an important material for electrical and electronic devices. Because the diamond is in contact with the metal in these applications, it becomes necessary to study the metal-diamond interaction and the structure of the interface, in particular, at elevated temperatures. In this work, we study the interaction of the (100) and (111) surfaces of a synthetic diamond single crystal with spattered titanium and molybdenum films. Atomic force microscopy reveals a uniform coating of titanium and the formation of flattened molybdenum nanoparticles. A thin titanium film is completely oxidized upon contact with air and passes from the oxidized state to the carbide state upon annealing in an ultrahigh vacuum at 800 °C. Molybdenum interacts with the (111) diamond surface already at 500 °C, which leads to the carbidization of its nanoparticles and catalytic graphitization of the diamond surface. This process is much slower on the (100) diamond surface; sp2-hybridized carbon is formed on the diamond and the top of molybdenum carbide nanoparticles, only when the annealing temperature is raised to 800 °C. The conductivity of the resulting sample is improved when compared to the Ti-coated diamond substrates and the Mo-coated (111) substrate annealed at 800 °C. The presented results could be useful for the development of graphene-on-diamond electronics.

KW - AFM

KW - XPS

KW - annealing

KW - diamond

KW - molybdenum

KW - sp2 carbon

KW - titanium

UR - https://www.scopus.com/record/display.uri?eid=2-s2.0-85149202284&origin=inward&txGid=64ece62a43c5a06d1214de740dd25cb3

UR - https://www.elibrary.ru/item.asp?id=50418836

UR - https://www.mendeley.com/catalogue/edf97950-e55b-30e8-b306-544c90650ac3/

U2 - 10.3390/ma16041650

DO - 10.3390/ma16041650

M3 - Article

C2 - 36837276

VL - 16

JO - Materials

JF - Materials

SN - 1996-1944

IS - 4

M1 - 1650

ER -