Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
Dynamics of Growth of the Native Oxide of Cd xHg1−xTe. / Sidorov, G. Yu; Shvets, V. A.; Sidorov, Yu G. и др.
в: Optoelectronics, Instrumentation and Data Processing, Том 53, № 6, 01.11.2017, стр. 617-624.Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
}
TY - JOUR
T1 - Dynamics of Growth of the Native Oxide of Cd xHg1−xTe
AU - Sidorov, G. Yu
AU - Shvets, V. A.
AU - Sidorov, Yu G.
AU - Varavin, V. S.
PY - 2017/11/1
Y1 - 2017/11/1
N2 - The growth of the native oxide of the CdxHg1−xTe (MCT) compound is studied by methods of laser and spectral ellipsometry. It is found that a non-absorbing oxide film is formed from the very beginning in the case of MCT oxidation with hydrogen peroxide vapors, whereas oxidation with atmospheric oxygen leads to the formation of absorbing layers on the surface at the first stages of the process. When the oxide film thickness reaches 1–2 nm, the oxidation rate drastically decreases. If MCT samples that were stored for a long time (for years) in air at room temperature are heated at T = 200 °C, the optical thickness of the oxide film decreases.
AB - The growth of the native oxide of the CdxHg1−xTe (MCT) compound is studied by methods of laser and spectral ellipsometry. It is found that a non-absorbing oxide film is formed from the very beginning in the case of MCT oxidation with hydrogen peroxide vapors, whereas oxidation with atmospheric oxygen leads to the formation of absorbing layers on the surface at the first stages of the process. When the oxide film thickness reaches 1–2 nm, the oxidation rate drastically decreases. If MCT samples that were stored for a long time (for years) in air at room temperature are heated at T = 200 °C, the optical thickness of the oxide film decreases.
KW - ellipsometry
KW - MCT
KW - native oxide
KW - SEMICONDUCTOR
UR - http://www.scopus.com/inward/record.url?scp=85042721868&partnerID=8YFLogxK
U2 - 10.3103/S8756699017060127
DO - 10.3103/S8756699017060127
M3 - Article
AN - SCOPUS:85042721868
VL - 53
SP - 617
EP - 624
JO - Optoelectronics, Instrumentation and Data Processing
JF - Optoelectronics, Instrumentation and Data Processing
SN - 8756-6990
IS - 6
ER -
ID: 10342960