Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
Composition-sensitive growth kinetics and dispersive optical properties of thin HfxTi1−xO2 (0 ≤ x ≤ 1) films prepared by the ALD method. / Atuchin, V. V.; Lebedev, M. S.; Korolkov, I. V. и др.
в: Journal of Materials Science: Materials in Electronics, Том 30, № 1, 15.01.2019, стр. 812-823.Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
}
TY - JOUR
T1 - Composition-sensitive growth kinetics and dispersive optical properties of thin HfxTi1−xO2 (0 ≤ x ≤ 1) films prepared by the ALD method
AU - Atuchin, V. V.
AU - Lebedev, M. S.
AU - Korolkov, I. V.
AU - Kruchinin, V. N.
AU - Maksimovskii, E. A.
AU - Trubin, S. V.
PY - 2019/1/15
Y1 - 2019/1/15
N2 - The optical quality HfxTi1−xO2 films with a wide range of the Hf/Ti ratio were prepared on Si (100) substrates by the ALD method with the use of tetrakis(ethylmethylamido)hafnium(IV) (Hf(NC2H5CH3)4, TEMAH) and titanium(IV) chloride TiCl4 as Hf and Ti precursors, respectively. The H2O vapor was applied as oxygen source. The structural properties of the as-deposited and annealed films were evaluated by the XRD analysis. The Hf/Ti ratio in the films was measured by energy dispersive spectroscopy and X-ray photoelectron spectroscopy. The dispersive optical constants were obtained by spectroscopic ellipsometry over the photon energy range of E = 1.12–4.96 eV. The specific growth kinetics is observed for 0 < x < 1. The optical constants wide-range tuning is reached in the HfxTi1−xO2 (x = 0–1) films via the chemical composition variation and annealing.
AB - The optical quality HfxTi1−xO2 films with a wide range of the Hf/Ti ratio were prepared on Si (100) substrates by the ALD method with the use of tetrakis(ethylmethylamido)hafnium(IV) (Hf(NC2H5CH3)4, TEMAH) and titanium(IV) chloride TiCl4 as Hf and Ti precursors, respectively. The H2O vapor was applied as oxygen source. The structural properties of the as-deposited and annealed films were evaluated by the XRD analysis. The Hf/Ti ratio in the films was measured by energy dispersive spectroscopy and X-ray photoelectron spectroscopy. The dispersive optical constants were obtained by spectroscopic ellipsometry over the photon energy range of E = 1.12–4.96 eV. The specific growth kinetics is observed for 0 < x < 1. The optical constants wide-range tuning is reached in the HfxTi1−xO2 (x = 0–1) films via the chemical composition variation and annealing.
KW - ATOMIC LAYER DEPOSITION
KW - RAY PHOTOELECTRON-SPECTROSCOPY
KW - ELECTRONIC-STRUCTURE
KW - ELECTRICAL-PROPERTIES
KW - PROCESS TEMPERATURE
KW - TITANIUM-DIOXIDE
KW - TIO2 FILMS
KW - GATE
KW - SILICON
KW - HFO2
UR - http://www.scopus.com/inward/record.url?scp=85056460912&partnerID=8YFLogxK
U2 - 10.1007/s10854-018-0351-z
DO - 10.1007/s10854-018-0351-z
M3 - Article
AN - SCOPUS:85056460912
VL - 30
SP - 812
EP - 823
JO - Journal of Materials Science: Materials in Electronics
JF - Journal of Materials Science: Materials in Electronics
SN - 0957-4522
IS - 1
ER -
ID: 17472434