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Broadband Antireflection Coatings Made of Resonant Submicron- And Micron-Sized SiGe Particles Grown on Si Substrates. / Shklyaev, Alexander A.; Tsarev, Andrei V.

в: IEEE Photonics Journal, Том 13, № 3, 9435026, 06.2021.

Результаты исследований: Научные публикации в периодических изданияхстатьяРецензирование

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@article{d4c3743ab0054a10b7b8924beac3049e,
title = "Broadband Antireflection Coatings Made of Resonant Submicron- And Micron-Sized SiGe Particles Grown on Si Substrates",
abstract = "The solid-state dewetting phenomenon was used to obtain submicron- and micron-sized SiGe particle arrays by the Ge deposition on Si(100) substrates. Their transmission and reflection spectra were measured and numerically modeled by the FDTD method. They exhibit resonance effects in broad infrared spectral ranges, depending on the particle size. The broadband antireflection property is associated with wide particle size distributions and the influence of a high-index substrate. The results show that the dewetting phenomenon provides the natural formation of arrays of particles shaped as close to a sphere segment, and they turned out to be effective as antireflection coatings. ",
keywords = "fabrication and characterization, FDTD method, metamaterials, numerical simulation, optical properties of photonic materials, Thin film coatings",
author = "Shklyaev, {Alexander A.} and Tsarev, {Andrei V.}",
note = "Funding Information: Manuscript received April 20, 2021; accepted May 12, 2021. Date of publication May 18, 2021; date of current version June 3, 2021. This work was supported by Ministry of Science and Higher Education of the Russian Federation under Grant 075-15-2020-797 (13.1902.21.0024)) Corresponding author: Alexander A. Shklyaev (e-mail: shklyaev@isp.nsc.ru). Publisher Copyright: {\textcopyright} 2009-2012 IEEE. Copyright: Copyright 2021 Elsevier B.V., All rights reserved.",
year = "2021",
month = jun,
doi = "10.1109/JPHOT.2021.3081100",
language = "English",
volume = "13",
journal = "IEEE Photonics Journal",
issn = "1943-0655",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "3",

}

RIS

TY - JOUR

T1 - Broadband Antireflection Coatings Made of Resonant Submicron- And Micron-Sized SiGe Particles Grown on Si Substrates

AU - Shklyaev, Alexander A.

AU - Tsarev, Andrei V.

N1 - Funding Information: Manuscript received April 20, 2021; accepted May 12, 2021. Date of publication May 18, 2021; date of current version June 3, 2021. This work was supported by Ministry of Science and Higher Education of the Russian Federation under Grant 075-15-2020-797 (13.1902.21.0024)) Corresponding author: Alexander A. Shklyaev (e-mail: shklyaev@isp.nsc.ru). Publisher Copyright: © 2009-2012 IEEE. Copyright: Copyright 2021 Elsevier B.V., All rights reserved.

PY - 2021/6

Y1 - 2021/6

N2 - The solid-state dewetting phenomenon was used to obtain submicron- and micron-sized SiGe particle arrays by the Ge deposition on Si(100) substrates. Their transmission and reflection spectra were measured and numerically modeled by the FDTD method. They exhibit resonance effects in broad infrared spectral ranges, depending on the particle size. The broadband antireflection property is associated with wide particle size distributions and the influence of a high-index substrate. The results show that the dewetting phenomenon provides the natural formation of arrays of particles shaped as close to a sphere segment, and they turned out to be effective as antireflection coatings.

AB - The solid-state dewetting phenomenon was used to obtain submicron- and micron-sized SiGe particle arrays by the Ge deposition on Si(100) substrates. Their transmission and reflection spectra were measured and numerically modeled by the FDTD method. They exhibit resonance effects in broad infrared spectral ranges, depending on the particle size. The broadband antireflection property is associated with wide particle size distributions and the influence of a high-index substrate. The results show that the dewetting phenomenon provides the natural formation of arrays of particles shaped as close to a sphere segment, and they turned out to be effective as antireflection coatings.

KW - fabrication and characterization

KW - FDTD method

KW - metamaterials

KW - numerical simulation

KW - optical properties of photonic materials

KW - Thin film coatings

UR - http://www.scopus.com/inward/record.url?scp=85107207061&partnerID=8YFLogxK

U2 - 10.1109/JPHOT.2021.3081100

DO - 10.1109/JPHOT.2021.3081100

M3 - Article

AN - SCOPUS:85107207061

VL - 13

JO - IEEE Photonics Journal

JF - IEEE Photonics Journal

SN - 1943-0655

IS - 3

M1 - 9435026

ER -

ID: 29233520