Research output: Contribution to journal › Article › peer-review
Broadband Antireflection Coatings Made of Resonant Submicron- And Micron-Sized SiGe Particles Grown on Si Substrates. / Shklyaev, Alexander A.; Tsarev, Andrei V.
In: IEEE Photonics Journal, Vol. 13, No. 3, 9435026, 06.2021.Research output: Contribution to journal › Article › peer-review
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TY - JOUR
T1 - Broadband Antireflection Coatings Made of Resonant Submicron- And Micron-Sized SiGe Particles Grown on Si Substrates
AU - Shklyaev, Alexander A.
AU - Tsarev, Andrei V.
N1 - Funding Information: Manuscript received April 20, 2021; accepted May 12, 2021. Date of publication May 18, 2021; date of current version June 3, 2021. This work was supported by Ministry of Science and Higher Education of the Russian Federation under Grant 075-15-2020-797 (13.1902.21.0024)) Corresponding author: Alexander A. Shklyaev (e-mail: shklyaev@isp.nsc.ru). Publisher Copyright: © 2009-2012 IEEE. Copyright: Copyright 2021 Elsevier B.V., All rights reserved.
PY - 2021/6
Y1 - 2021/6
N2 - The solid-state dewetting phenomenon was used to obtain submicron- and micron-sized SiGe particle arrays by the Ge deposition on Si(100) substrates. Their transmission and reflection spectra were measured and numerically modeled by the FDTD method. They exhibit resonance effects in broad infrared spectral ranges, depending on the particle size. The broadband antireflection property is associated with wide particle size distributions and the influence of a high-index substrate. The results show that the dewetting phenomenon provides the natural formation of arrays of particles shaped as close to a sphere segment, and they turned out to be effective as antireflection coatings.
AB - The solid-state dewetting phenomenon was used to obtain submicron- and micron-sized SiGe particle arrays by the Ge deposition on Si(100) substrates. Their transmission and reflection spectra were measured and numerically modeled by the FDTD method. They exhibit resonance effects in broad infrared spectral ranges, depending on the particle size. The broadband antireflection property is associated with wide particle size distributions and the influence of a high-index substrate. The results show that the dewetting phenomenon provides the natural formation of arrays of particles shaped as close to a sphere segment, and they turned out to be effective as antireflection coatings.
KW - fabrication and characterization
KW - FDTD method
KW - metamaterials
KW - numerical simulation
KW - optical properties of photonic materials
KW - Thin film coatings
UR - http://www.scopus.com/inward/record.url?scp=85107207061&partnerID=8YFLogxK
U2 - 10.1109/JPHOT.2021.3081100
DO - 10.1109/JPHOT.2021.3081100
M3 - Article
AN - SCOPUS:85107207061
VL - 13
JO - IEEE Photonics Journal
JF - IEEE Photonics Journal
SN - 1943-0655
IS - 3
M1 - 9435026
ER -
ID: 29233520