Результаты исследований: Публикации в книгах, отчётах, сборниках, трудах конференций › статья в сборнике материалов конференции › научная › Рецензирование
Applications of fs laser radiation for formation of thermochemical lipss on Cr films and fabrication of submicron amplitude gratings. / Dostovalov, A. V.; Korolkov, V. P.; Terentyev, V. S. и др.
2017 Progress in Electromagnetics Research Symposium - Spring, PIERS 2017. Том Part F134321 Electromagnetics Academy, 2018. стр. 3768-3770 (Progress in Electromagnetics Research Symposium).Результаты исследований: Публикации в книгах, отчётах, сборниках, трудах конференций › статья в сборнике материалов конференции › научная › Рецензирование
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TY - GEN
T1 - Applications of fs laser radiation for formation of thermochemical lipss on Cr films and fabrication of submicron amplitude gratings
AU - Dostovalov, A. V.
AU - Korolkov, V. P.
AU - Terentyev, V. S.
AU - Babin, S. A.
PY - 2018/1/16
Y1 - 2018/1/16
N2 - The paper presents the results of the formation of thermochemical laser induced periodic surface structure on Cr thin films (40-350 nm) that was sputtered on the glass substrate. The different dependence of TLIPSS formation on processing rate in case of thin (40 nm) and thick (350 nm) is observed.
AB - The paper presents the results of the formation of thermochemical laser induced periodic surface structure on Cr thin films (40-350 nm) that was sputtered on the glass substrate. The different dependence of TLIPSS formation on processing rate in case of thin (40 nm) and thick (350 nm) is observed.
UR - http://www.scopus.com/inward/record.url?scp=85044957840&partnerID=8YFLogxK
U2 - 10.1109/PIERS.2017.8262413
DO - 10.1109/PIERS.2017.8262413
M3 - Conference contribution
AN - SCOPUS:85044957840
VL - Part F134321
T3 - Progress in Electromagnetics Research Symposium
SP - 3768
EP - 3770
BT - 2017 Progress in Electromagnetics Research Symposium - Spring, PIERS 2017
PB - Electromagnetics Academy
T2 - 2017 Progress In Electromagnetics Research Symposium - Spring, PIERS 2017
Y2 - 22 May 2017 through 25 May 2017
ER -
ID: 12417308