TY - JOUR

T1 - Angle-Dependent Metasurface for Nonspectroscopic THz Sensing of Submicrometer Films

AU - Tumashov, Maksim A.

AU - Baena, Juan D.

AU - Del Risco, Juan P.

AU - Lazorskiy, Pavel A.

AU - Glybovski, Stanislav B.

AU - Kuznetsov, Sergei A.

N1 - Публикация для корректииовки.

PY - 2023/12/11

Y1 - 2023/12/11

N2 - Efficient sensors for terahertz (THz) frequency range are in high demand for applications in biomedicine, chemistry, security, and electronics. Conventional thin-film sensing relies on spectroscopy, while improved sensitivity can be achieved using frequency selective electromagnetic metasurfaces. A simpler and innovative approach involves a nonspectroscopic method using a single-frequency THz source and an angle-dependent metasurface under oblique illumination. This method derives analyte parameters from the shift in the resonant transmission angle. We further develop this platform and investigate a new metasurface operating at 0.139 THz, exhibiting a strong variation of a narrow stopband with the angle of incidence. Theoretical, numerical, and experimental results demonstrate the metasurface’s ability to detect submicron-thick films. The proposed nonspectroscopic sensing technique offers a promising avenue for highly efficient and sensitive detection of dielectric thin films.

AB - Efficient sensors for terahertz (THz) frequency range are in high demand for applications in biomedicine, chemistry, security, and electronics. Conventional thin-film sensing relies on spectroscopy, while improved sensitivity can be achieved using frequency selective electromagnetic metasurfaces. A simpler and innovative approach involves a nonspectroscopic method using a single-frequency THz source and an angle-dependent metasurface under oblique illumination. This method derives analyte parameters from the shift in the resonant transmission angle. We further develop this platform and investigate a new metasurface operating at 0.139 THz, exhibiting a strong variation of a narrow stopband with the angle of incidence. Theoretical, numerical, and experimental results demonstrate the metasurface’s ability to detect submicron-thick films. The proposed nonspectroscopic sensing technique offers a promising avenue for highly efficient and sensitive detection of dielectric thin films.

KW - Impedance

KW - Metasurface

KW - Metasurfaces

KW - Mirrors

KW - Resonant frequency

KW - Sensors

KW - Surface impedance

KW - Surface waves

KW - sensing

KW - terahertz

KW - thin-film

KW - terahertz (THz)

KW - Metasurface (MS)

UR - https://www.scopus.com/record/display.uri?eid=2-s2.0-85174845690&origin=inward&txGid=efbeeb2e0cff82ce9414d73c96ab5ee9

UR - https://www.mendeley.com/catalogue/2eef0cb3-be41-3b1f-aad2-fb6413f53782/

U2 - 10.1109/JSEN.2023.3319955

DO - 10.1109/JSEN.2023.3319955

M3 - Article

VL - 23

SP - 27262

EP - 27272

JO - IEEE Sensors Journal

JF - IEEE Sensors Journal

SN - 1530-437X

IS - 22

ER -