Aluminium nitride thin films surface smoothing by argon cluster ions

Standard

Aluminium nitride thin films surface smoothing by argon cluster ions. / Korobeishchikov, Nikolay ; Geydt, Pavel ; Nikolaev, Ivan и др.

Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020. Institute of Electrical and Electronics Engineers Inc., 2020. стр. 722-725 9242187 (Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020).

Результаты исследований: Публикации в книгах, отчётах, сборниках, трудах конференций › статья в сборнике материалов конференции › научная › Рецензирование

Harvard

Korobeishchikov, N , Geydt, P , Nikolaev, I, Strunin, V & Roenko, M 2020, Aluminium nitride thin films surface smoothing by argon cluster ions. в Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020., 9242187, Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020, Institute of Electrical and Electronics Engineers Inc., стр. 722-725, 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020, Virtual, Tomsk, Российская Федерация, 14.09.2020. https://doi.org/10.1109/EFRE47760.2020.9242187

APA

Korobeishchikov, N., Geydt, P., Nikolaev, I., Strunin, V., & Roenko, M. (2020). Aluminium nitride thin films surface smoothing by argon cluster ions. в Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020 (стр. 722-725). [9242187] (Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/EFRE47760.2020.9242187

Vancouver

Korobeishchikov N , Geydt P , Nikolaev I, Strunin V, Roenko M. Aluminium nitride thin films surface smoothing by argon cluster ions. в Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020. Institute of Electrical and Electronics Engineers Inc. 2020. стр. 722-725. 9242187. (Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020). doi: 10.1109/EFRE47760.2020.9242187

Author

Korobeishchikov, Nikolay ; Geydt, Pavel ; Nikolaev, Ivan и др. / Aluminium nitride thin films surface smoothing by argon cluster ions. Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020. Institute of Electrical and Electronics Engineers Inc., 2020. стр. 722-725 (Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020).

BibTeX

@inproceedings{f4b1c0a4de5746bcb59f2fe5b90efee8,

title = "Aluminium nitride thin films surface smoothing by argon cluster ions",

abstract = "In this paper, the opportunity of using an argon cluster ion beam for processing the surface of aluminium nitride polycrystalline thin films is studied. The treatment was carried out in two fundamentally different experimental modes, at high and low kinetic energy per atom in the cluster, 105 and 10 eV/atom, respectively. The possibility of highly effective smoothing of the surface of a nanostructured aluminium nitride thin film with a minimum depth of the removed (sputtered) material is demonstrated.",

keywords = "Aluminium nitride thin films, Atomic force microscopy (AFM), Gas cluster ion beam, Surface smoothing",

author = "Nikolay Korobeishchikov and Pavel Geydt and Ivan Nikolaev and Vladimir Strunin and Maxim Roenko",

note = "Publisher Copyright: {\textcopyright} 2020 IEEE. Copyright: Copyright 2020 Elsevier B.V., All rights reserved.; 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020 ; Conference date: 14-09-2020 Through 26-09-2020",

year = "2020",

month = sep,

day = "14",

doi = "10.1109/EFRE47760.2020.9242187",

language = "English",

series = "Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "722--725",

booktitle = "Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020",

address = "United States",

}

RIS

TY - GEN

T1 - Aluminium nitride thin films surface smoothing by argon cluster ions

AU - Korobeishchikov, Nikolay

AU - Geydt, Pavel

AU - Nikolaev, Ivan

AU - Strunin, Vladimir

AU - Roenko, Maxim

PY - 2020/9/14

Y1 - 2020/9/14

N2 - In this paper, the opportunity of using an argon cluster ion beam for processing the surface of aluminium nitride polycrystalline thin films is studied. The treatment was carried out in two fundamentally different experimental modes, at high and low kinetic energy per atom in the cluster, 105 and 10 eV/atom, respectively. The possibility of highly effective smoothing of the surface of a nanostructured aluminium nitride thin film with a minimum depth of the removed (sputtered) material is demonstrated.

AB - In this paper, the opportunity of using an argon cluster ion beam for processing the surface of aluminium nitride polycrystalline thin films is studied. The treatment was carried out in two fundamentally different experimental modes, at high and low kinetic energy per atom in the cluster, 105 and 10 eV/atom, respectively. The possibility of highly effective smoothing of the surface of a nanostructured aluminium nitride thin film with a minimum depth of the removed (sputtered) material is demonstrated.

KW - Aluminium nitride thin films

KW - Atomic force microscopy (AFM)

KW - Gas cluster ion beam

KW - Surface smoothing

UR - http://www.scopus.com/inward/record.url?scp=85097619822&partnerID=8YFLogxK

U2 - 10.1109/EFRE47760.2020.9242187

DO - 10.1109/EFRE47760.2020.9242187

M3 - Conference contribution

AN - SCOPUS:85097619822

T3 - Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020

SP - 722

EP - 725

BT - Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020

Y2 - 14 September 2020 through 26 September 2020

ER -

ID: 27086290