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A method for fabricating the ordered arrays of silicon nanopillars. / Basalaeva, L. S.; Nastaushev, Yu V.; Dultsev, F. N.
в: Materials Today: Proceedings, Том 4, № 11, 01.01.2017, стр. 11341-11345.Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
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TY - JOUR
T1 - A method for fabricating the ordered arrays of silicon nanopillars
AU - Basalaeva, L. S.
AU - Nastaushev, Yu V.
AU - Dultsev, F. N.
PY - 2017/1/1
Y1 - 2017/1/1
N2 - In this paper, the formation of the arrays of silicon nanopillars by means of electron-beam lithography and dry etching is described. Silicon nanopillars 50 to 350 nm in diameter, 80 to 800 nm high were fabricated. Important features of the formation of these structures were described. Cones and tapered cones can be formed with the help of this method.
AB - In this paper, the formation of the arrays of silicon nanopillars by means of electron-beam lithography and dry etching is described. Silicon nanopillars 50 to 350 nm in diameter, 80 to 800 nm high were fabricated. Important features of the formation of these structures were described. Cones and tapered cones can be formed with the help of this method.
KW - Nanolithography
KW - Plasma etching
KW - Silicon nanopillars
KW - nanolithography
KW - silicon nanopillars
KW - NANOWIRES
KW - plasma etching
UR - http://www.scopus.com/inward/record.url?scp=85032027818&partnerID=8YFLogxK
U2 - 10.1016/j.matpr.2017.09.005
DO - 10.1016/j.matpr.2017.09.005
M3 - Article
AN - SCOPUS:85032027818
VL - 4
SP - 11341
EP - 11345
JO - Materials Today: Proceedings
JF - Materials Today: Proceedings
SN - 2214-7853
IS - 11
ER -
ID: 9874854