Original languageEnglish
Title of host publicationProceedings of the 2022 IEEE 23rd International Conference of Young Professionals in Electron Devices and Materials, EDM 2022
PublisherIEEE Computer Society
Pages37-41
Number of pages5
ISBN (Electronic)9781665498043
ISBN (Print)9781665498043
DOIs
Publication statusPublished - 2022
Event23rd IEEE International Conference of Young Professionals in Electron Devices and Materials, EDM 2022 - Altai, Russian Federation
Duration: 30 Jun 20224 Jul 2022

Publication series

NameInternational Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM
Volume2022-June
ISSN (Print)2325-4173
ISSN (Electronic)2325-419X

Conference

Conference23rd IEEE International Conference of Young Professionals in Electron Devices and Materials, EDM 2022
Country/TerritoryRussian Federation
CityAltai
Period30.06.202204.07.2022

    OECD FOS+WOS

  • 1.03 PHYSICAL SCIENCES AND ASTRONOMY

    Research areas

  • atomic layer deposition, chemical vapor deposition, resistive switches, semiconductor-metal phase transition, Vanadium dioxide

ID: 37124557