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Two-dimensional photonic crystals fabrication and close-packing by electron-beam lithography. / Utkin, Dmitry E.; Nasimov, Dmitry A.; Latyshev, Alexander V.

2012 13th Annual International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM'2012 - Proceedings. 2012. p. 47-50 6310185 (International Workshop and Tutorials on Electron Devices and Materials, EDM - Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review

Harvard

Utkin, DE, Nasimov, DA & Latyshev, AV 2012, Two-dimensional photonic crystals fabrication and close-packing by electron-beam lithography. in 2012 13th Annual International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM'2012 - Proceedings., 6310185, International Workshop and Tutorials on Electron Devices and Materials, EDM - Proceedings, pp. 47-50, 2012 13th Annual International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM'2012, Erlagol, Altai, Russian Federation, 02.07.2012. https://doi.org/10.1109/EDM.2012.6310185

APA

Utkin, D. E., Nasimov, D. A., & Latyshev, A. V. (2012). Two-dimensional photonic crystals fabrication and close-packing by electron-beam lithography. In 2012 13th Annual International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM'2012 - Proceedings (pp. 47-50). [6310185] (International Workshop and Tutorials on Electron Devices and Materials, EDM - Proceedings). https://doi.org/10.1109/EDM.2012.6310185

Vancouver

Utkin DE, Nasimov DA, Latyshev AV. Two-dimensional photonic crystals fabrication and close-packing by electron-beam lithography. In 2012 13th Annual International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM'2012 - Proceedings. 2012. p. 47-50. 6310185. (International Workshop and Tutorials on Electron Devices and Materials, EDM - Proceedings). doi: 10.1109/EDM.2012.6310185

Author

Utkin, Dmitry E. ; Nasimov, Dmitry A. ; Latyshev, Alexander V. / Two-dimensional photonic crystals fabrication and close-packing by electron-beam lithography. 2012 13th Annual International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM'2012 - Proceedings. 2012. pp. 47-50 (International Workshop and Tutorials on Electron Devices and Materials, EDM - Proceedings).

BibTeX

@inproceedings{28176593aaf04e319546380b75f0620a,
title = "Two-dimensional photonic crystals fabrication and close-packing by electron-beam lithography",
abstract = "It is brought an approach of creation and close-packing two-dimensional photonic crystals with given sizes of elements by the EBL. The main problems of formation these structures were considered.",
keywords = "lithography, Photonic crystal, proximity effect",
author = "Utkin, {Dmitry E.} and Nasimov, {Dmitry A.} and Latyshev, {Alexander V.}",
year = "2012",
doi = "10.1109/EDM.2012.6310185",
language = "English",
isbn = "9781467325202",
series = "International Workshop and Tutorials on Electron Devices and Materials, EDM - Proceedings",
pages = "47--50",
booktitle = "2012 13th Annual International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM'2012 - Proceedings",
note = "2012 13th Annual International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM'2012 ; Conference date: 02-07-2012 Through 06-07-2012",

}

RIS

TY - GEN

T1 - Two-dimensional photonic crystals fabrication and close-packing by electron-beam lithography

AU - Utkin, Dmitry E.

AU - Nasimov, Dmitry A.

AU - Latyshev, Alexander V.

PY - 2012

Y1 - 2012

N2 - It is brought an approach of creation and close-packing two-dimensional photonic crystals with given sizes of elements by the EBL. The main problems of formation these structures were considered.

AB - It is brought an approach of creation and close-packing two-dimensional photonic crystals with given sizes of elements by the EBL. The main problems of formation these structures were considered.

KW - lithography

KW - Photonic crystal

KW - proximity effect

UR - http://www.scopus.com/inward/record.url?scp=84868666287&partnerID=8YFLogxK

U2 - 10.1109/EDM.2012.6310185

DO - 10.1109/EDM.2012.6310185

M3 - Conference contribution

AN - SCOPUS:84868666287

SN - 9781467325202

T3 - International Workshop and Tutorials on Electron Devices and Materials, EDM - Proceedings

SP - 47

EP - 50

BT - 2012 13th Annual International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM'2012 - Proceedings

T2 - 2012 13th Annual International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM'2012

Y2 - 2 July 2012 through 6 July 2012

ER -

ID: 25602446