| Original language | English | 
|---|---|
| Title of host publication | 2012 13th Annual International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM'2012 - Proceedings | 
| Pages | 47-50 | 
| Number of pages | 4 | 
| DOIs | |
| Publication status | Published - 2012 | 
| Externally published | Yes | 
| Event | 2012 13th Annual International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices - Erlagol, Altai, Russian Federation Duration: 2 Jul 2012 → 6 Jul 2012 Conference number: 13 | 
| Name | International Workshop and Tutorials on Electron Devices and Materials, EDM - Proceedings | 
|---|---|
| ISSN (Print) | 1815-3712 | 
| Conference | 2012 13th Annual International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices | 
|---|---|
| Abbreviated title | EDM'2012 | 
| Country/Territory | Russian Federation | 
| City | Erlagol, Altai | 
| Period | 02.07.2012 → 06.07.2012 | 
ID: 25602446