DOI

Original languageEnglish
Title of host publication2012 13th Annual International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM'2012 - Proceedings
Pages47-50
Number of pages4
DOIs
Publication statusPublished - 2012
Externally publishedYes
Event2012 13th Annual International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM'2012 - Erlagol, Altai, Russian Federation
Duration: 2 Jul 20126 Jul 2012

Publication series

NameInternational Workshop and Tutorials on Electron Devices and Materials, EDM - Proceedings
ISSN (Print)1815-3712

Conference

Conference2012 13th Annual International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM'2012
Country/TerritoryRussian Federation
CityErlagol, Altai
Period02.07.201206.07.2012

    Research areas

  • lithography, Photonic crystal, proximity effect

    OECD FOS+WOS

  • 2.02 ELECTRICAL ENG, ELECTRONIC ENG

ID: 25602446