TY - JOUR

T1 - Thermal properties of indium tris-dipivaloylmethanate as a volatile precursor for indium oxide materials

AU - Vikulova, Evgeniia S.

AU - Turgambaeva, Asiya E.

AU - Rogov, Vladimir A.

AU - Nazarova, Anna A.

AU - Zherikova, Kseniya V.

AU - Korolkov, Ilya V.

AU - Morozova, Natalia B.

AU - Zelenina, Ludmila N.

N1 - Funding Information: The research was supported by the Ministry of Science and Higher Education of the Russian Federation , N 121031700314-5 and 121031700313-8 . Publisher Copyright: © 2021 Elsevier Ltd

PY - 2022/3

Y1 - 2022/3

N2 - Thermophysical and thermochemical data including condensed and vapor phase transformations and temperature stability ranges, melting, sublimation and vaporization processes for a volatile metal-organic precursor are of current importance to optimize the preparation of functional nano-materials through chemical vapor deposition, atomic layer deposition and their modifications. Here, we present the results of a comprehensive thermal characterization of indium tris-dipivaloylmethanate, In(thd)3 or In(dpm)3, which is a convenient air-stable precursor for widely demanded indium oxide ceramics. Thermogravimetry was applied to evaluate the condensed phase stability both in inert and oxidizing atmosphere. The melting temperature and enthalpy were measured by differential scanning calorimetry. The pressure of saturated and unsaturated In(thd)3 vapors was measured using a static method with glass membrane-gauge manometer. The p(T) equations of saturated vapors over the solid and liquid complex were obtained and the thermodynamic characteristics of the processes under study were calculated. The thermal decomposition of In(thd)3 vapors on a heated surface in vacuum and in oxygen presence was investigated by in situ mass spectrometry. The temperature range of this process and its intramolecular character were revealed. A critical review of the literature data on the thermal properties of In(thd)3 was also performed.

AB - Thermophysical and thermochemical data including condensed and vapor phase transformations and temperature stability ranges, melting, sublimation and vaporization processes for a volatile metal-organic precursor are of current importance to optimize the preparation of functional nano-materials through chemical vapor deposition, atomic layer deposition and their modifications. Here, we present the results of a comprehensive thermal characterization of indium tris-dipivaloylmethanate, In(thd)3 or In(dpm)3, which is a convenient air-stable precursor for widely demanded indium oxide ceramics. Thermogravimetry was applied to evaluate the condensed phase stability both in inert and oxidizing atmosphere. The melting temperature and enthalpy were measured by differential scanning calorimetry. The pressure of saturated and unsaturated In(thd)3 vapors was measured using a static method with glass membrane-gauge manometer. The p(T) equations of saturated vapors over the solid and liquid complex were obtained and the thermodynamic characteristics of the processes under study were calculated. The thermal decomposition of In(thd)3 vapors on a heated surface in vacuum and in oxygen presence was investigated by in situ mass spectrometry. The temperature range of this process and its intramolecular character were revealed. A critical review of the literature data on the thermal properties of In(thd)3 was also performed.

KW - Diketonate

KW - Indium volatile precursor

KW - Melting and evaporation processes

KW - MOCVD

KW - Thermolysis

UR - http://www.scopus.com/inward/record.url?scp=85122503634&partnerID=8YFLogxK

U2 - 10.1016/j.vacuum.2021.110856

DO - 10.1016/j.vacuum.2021.110856

M3 - Article

AN - SCOPUS:85122503634

VL - 197

JO - Vacuum

JF - Vacuum

SN - 0042-207X

M1 - 110856

ER -