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Thermal properties of indium tris-dipivaloylmethanate as a volatile precursor for indium oxide materials

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Physical Chemistry Section

DOI

https://doi.org/10.1016/j.vacuum.2021.110856
Final published version

Evgeniia S. Vikulova
Asiya E. Turgambaeva
Vladimir A. Rogov
Anna A. Nazarova
Kseniya V. Zherikova
Ilya V. Korolkov
Natalia B. Morozova
Ludmila N. Zelenina

Original language	English
Article number	110856
Journal	Vacuum
Volume	197
DOIs	https://doi.org/10.1016/j.vacuum.2021.110856
Publication status	Published - Mar 2022

Research areas

Diketonate, Indium volatile precursor, Melting and evaporation processes, MOCVD, Thermolysis

OECD FOS+WOS

2.05 MATERIALS ENGINEERING
1.03 PHYSICAL SCIENCES AND ASTRONOMY

ID: 35197607