The Evolution of the Conductivity and Cathodoluminescence of the Films of Hafnium Oxide in the Case of a Change in the Concentration of Oxygen Vacancies › Research Explorer

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The Evolution of the Conductivity and Cathodoluminescence of the Films of Hafnium Oxide in the Case of a Change in the Concentration of Oxygen Vacancies

Research output: Contribution to journal › Article › peer-review

DOI

https://doi.org/10.1134/S1063783418100098
Final published version

D. R. Islamov
V. A. Gritsenko
V. N. Kruchinin
E. V. Ivanova
M. V. Zamoryanskaya
M. S. Lebedev

Original language	English
Pages (from-to)	2050-2057
Number of pages	8
Journal	Physics of the Solid State
Volume	60
Issue number	10
DOIs	https://doi.org/10.1134/S1063783418100098
Publication status	Published - 1 Oct 2018

Research areas

ATOMIC LAYER DEPOSITION, DIELECTRICS, TRANSPORT, FILAMENT

OECD FOS+WOS

ID: 17088431