• I. A. Kostogrud
  • E. V. Boyko
Original languageEnglish
Article number012102
Number of pages6
JournalJournal of Physics: Conference Series
Volume1359
Issue number1
DOIs
Publication statusPublished - 21 Nov 2019
Event4th All-Russian Scientific Conference Thermophysics and Physical Hydrodynamics with the School for Young Scientists - Yalta, Crimea, Russian Federation
Duration: 15 Sept 201922 Sept 2019
Conference number: 4

    OECD FOS+WOS

    Research areas

  • CHEMICAL-VAPOR-DEPOSITION

ID: 23054735