Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review
THE DEPOSITION OF GERMANIUM NANOPARTICLES ON HYDROGENATED AMORPHOUS SILICON. / Stuchlik, Jiri; Volodin, Vladimir A.; Shklyaev, Alexander A. et al.
8TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH & APPLICATION (NANOCON 2016). TANGER LTD, 2017. p. 133-137.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review
}
TY - GEN
T1 - THE DEPOSITION OF GERMANIUM NANOPARTICLES ON HYDROGENATED AMORPHOUS SILICON
AU - Stuchlik, Jiri
AU - Volodin, Vladimir A.
AU - Shklyaev, Alexander A.
AU - Stuchlikova, The Ha
AU - Ledinsky, Martin
AU - Cermak, Jan
AU - Kupcik, Jaroslav
AU - Fajgar, Radek
AU - Mortet, Vincent
AU - More-Chevalier, Joris
AU - Ashcheulov, Petr
AU - Purkrt, Adam
AU - Remes, Zdenek
PY - 2017
Y1 - 2017
N2 - We reveal the mechanism of Ge nanoparticles (NPs) formation on the surface of the hydrogenated amorphous silicon (a-Si:H) deposited by Plasma Enhanced Chemical Vapor Deposition (PECVD) on ITO and a on boron doped nanocrystalline diamond (BDD). The coating of Ge NPs on a-Si:H was performed by molecular beam epitaxy (MBE) at temperatures up to 450 degrees C. The Ge NPs were characterized by Raman spectroscopy, scanning electron microscopy (SEM) and high resolution transmission electron microscopy (HRTEM). The nanocrystalline Ge particles are conglomerates of nanocrystals of size 10-15 nm and quantum dots (QDs) with size below 2 nm embedded in amorphous Ge phase. After coating with Ge NPs the a-Si:H thin films show better adhesion on BDD substrates then on ITO substrates.
AB - We reveal the mechanism of Ge nanoparticles (NPs) formation on the surface of the hydrogenated amorphous silicon (a-Si:H) deposited by Plasma Enhanced Chemical Vapor Deposition (PECVD) on ITO and a on boron doped nanocrystalline diamond (BDD). The coating of Ge NPs on a-Si:H was performed by molecular beam epitaxy (MBE) at temperatures up to 450 degrees C. The Ge NPs were characterized by Raman spectroscopy, scanning electron microscopy (SEM) and high resolution transmission electron microscopy (HRTEM). The nanocrystalline Ge particles are conglomerates of nanocrystals of size 10-15 nm and quantum dots (QDs) with size below 2 nm embedded in amorphous Ge phase. After coating with Ge NPs the a-Si:H thin films show better adhesion on BDD substrates then on ITO substrates.
KW - Ge nanoparticles
KW - a-Si:H
KW - PECVD
KW - MBE
KW - NANOCRYSTALLINE THIN-FILMS
KW - DIFFRACTION BASED ANALYSIS
KW - PHASE FRACTIONS
KW - TEXTURE
M3 - Conference contribution
SP - 133
EP - 137
BT - 8TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH & APPLICATION (NANOCON 2016)
PB - TANGER LTD
T2 - 8th International Conference on Nanomaterials - Research and Application (NANOCON)
Y2 - 19 October 2016 through 21 October 2016
ER -
ID: 18739490