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The Automation of a CVD-Reactor for the Synthesis of Vertically Oriented Carbon Nanotube Arrays. / Gusel’nikov, A. V.; Safronov, A. V.; Kurenya, A. G. et al.

In: Instruments and Experimental Techniques, Vol. 61, No. 4, 01.07.2018, p. 482-485.

Research output: Contribution to journal › Article › peer-review

Harvard

Gusel’nikov, AV, Safronov, AV, Kurenya, AG, Arkhipov, VE, Bolgarin, SG, Ivanov, AE, Kvashnin, AG & Okotrub, AV 2018, 'The Automation of a CVD-Reactor for the Synthesis of Vertically Oriented Carbon Nanotube Arrays', Instruments and Experimental Techniques, vol. 61, no. 4, pp. 482-485. https://doi.org/10.1134/S0020441218040206

APA

Gusel’nikov, A. V., Safronov, A. V., Kurenya, A. G., Arkhipov, V. E., Bolgarin, S. G., Ivanov, A. E., Kvashnin, A. G., & Okotrub, A. V. (2018). The Automation of a CVD-Reactor for the Synthesis of Vertically Oriented Carbon Nanotube Arrays. Instruments and Experimental Techniques, 61(4), 482-485. https://doi.org/10.1134/S0020441218040206

Vancouver

Gusel’nikov AV, Safronov AV, Kurenya AG, Arkhipov VE, Bolgarin SG, Ivanov AE et al. The Automation of a CVD-Reactor for the Synthesis of Vertically Oriented Carbon Nanotube Arrays. Instruments and Experimental Techniques. 2018 Jul 1;61(4):482-485. doi: 10.1134/S0020441218040206

Author

Gusel’nikov, A. V. ; Safronov, A. V. ; Kurenya, A. G. et al. / The Automation of a CVD-Reactor for the Synthesis of Vertically Oriented Carbon Nanotube Arrays. In: Instruments and Experimental Techniques. 2018 ; Vol. 61, No. 4. pp. 482-485.

BibTeX

@article{f0e8847103fe4ade8eb3e724254b4759,
title = "The Automation of a CVD-Reactor for the Synthesis of Vertically Oriented Carbon Nanotube Arrays",
abstract = "The functional diagram and the automation system of a CVD-reactor for the synthesis of vertically oriented carbon nanotube arrays on silicon substrates are described. The system is intended predominantly for recording the physical parameters of the CVD-reactor in real time, generating the instructions for the operator on the selected synthesis-process flow, on-screen display of the selected parameters, and management of the automatic protection of the reactor units and assemblies against contingencies or unspecified actions of the operator. The structure of the system for data acquisition, visualization of synthesis variables, and the CVD process control that allows the synthesis of vertically oriented carbon nanotube arrays is presented.",
author = "Gusel{\textquoteright}nikov, {A. V.} and Safronov, {A. V.} and Kurenya, {A. G.} and Arkhipov, {V. E.} and Bolgarin, {S. G.} and Ivanov, {A. E.} and Kvashnin, {A. G.} and Okotrub, {A. V.}",
year = "2018",
month = jul,
day = "1",
doi = "10.1134/S0020441218040206",
language = "English",
volume = "61",
pages = "482--485",
journal = "Instruments and Experimental Techniques",
issn = "0020-4412",
publisher = "Maik Nauka-Interperiodica Publishing",
number = "4",

}

RIS

TY - JOUR

T1 - The Automation of a CVD-Reactor for the Synthesis of Vertically Oriented Carbon Nanotube Arrays

AU - Gusel’nikov, A. V.

AU - Safronov, A. V.

AU - Kurenya, A. G.

AU - Arkhipov, V. E.

AU - Bolgarin, S. G.

AU - Ivanov, A. E.

AU - Kvashnin, A. G.

AU - Okotrub, A. V.

PY - 2018/7/1

Y1 - 2018/7/1

N2 - The functional diagram and the automation system of a CVD-reactor for the synthesis of vertically oriented carbon nanotube arrays on silicon substrates are described. The system is intended predominantly for recording the physical parameters of the CVD-reactor in real time, generating the instructions for the operator on the selected synthesis-process flow, on-screen display of the selected parameters, and management of the automatic protection of the reactor units and assemblies against contingencies or unspecified actions of the operator. The structure of the system for data acquisition, visualization of synthesis variables, and the CVD process control that allows the synthesis of vertically oriented carbon nanotube arrays is presented.

AB - The functional diagram and the automation system of a CVD-reactor for the synthesis of vertically oriented carbon nanotube arrays on silicon substrates are described. The system is intended predominantly for recording the physical parameters of the CVD-reactor in real time, generating the instructions for the operator on the selected synthesis-process flow, on-screen display of the selected parameters, and management of the automatic protection of the reactor units and assemblies against contingencies or unspecified actions of the operator. The structure of the system for data acquisition, visualization of synthesis variables, and the CVD process control that allows the synthesis of vertically oriented carbon nanotube arrays is presented.

UR - http://www.scopus.com/inward/record.url?scp=85051071301&partnerID=8YFLogxK

U2 - 10.1134/S0020441218040206

DO - 10.1134/S0020441218040206

M3 - Article

AN - SCOPUS:85051071301

VL - 61

SP - 482

EP - 485

JO - Instruments and Experimental Techniques

JF - Instruments and Experimental Techniques

SN - 0020-4412

IS - 4

ER -

ID: 16068781