Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review
| Original language | English |
|---|---|
| Title of host publication | Advances in X-Ray/EUV Optics and Components XVI |
| Editors | Christian Morawe, Ali M. Khounsary, Shunji Goto |
| Publisher | The International Society for Optical Engineering |
| Pages | 10 |
| ISBN (Electronic) | 9781510645127 |
| ISBN (Print) | 9781510645127 |
| DOIs | |
| Publication status | Published - 2021 |
| Event | Advances in X-Ray/EUV Optics and Components XVI 2021 - San Diego, United States Duration: 1 Aug 2021 → 5 Aug 2021 |
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Volume | 11837 |
| ISSN (Print) | 0277-786X |
| ISSN (Electronic) | 1996-756X |
| Conference | Advances in X-Ray/EUV Optics and Components XVI 2021 |
|---|---|
| Country/Territory | United States |
| City | San Diego |
| Period | 01.08.2021 → 05.08.2021 |
ID: 34641817